Problems in the Experimental Determination of Electron Energy Distribution Function in RF Discharges

Nonequilibrium Processes in Partially Ionized Gases - NATO ASI Series ◽

10.1007/978-1-4615-3780-9_34 ◽

1990 ◽

pp. 451-458

Author(s):

G. Dilecce ◽

M. Capitelli ◽

S. De Benedictis ◽

C. Gorse

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Experimental Determination ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

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Determination of Electron Energy Distribution Function of Plasmas by Digital Processing from Langmuir Probe Characteristic

Japanese Journal of Applied Physics ◽

10.1143/jjap.29.2139 ◽

1990 ◽

Vol 29 (Part 1, No. 10) ◽

pp. 2139-2144 ◽

Author(s):

Fumiyuki Fujita ◽

Hatsuo Yamazaki

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Digital Processing ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Probe Characteristic

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Electron‐energy distribution function measurements in capacitively coupled rf discharges

Journal of Applied Physics ◽

10.1063/1.348935 ◽

1991 ◽

Vol 69 (1) ◽

pp. 121-128 ◽

Author(s):

G. Dilecce ◽

M. Capitelli ◽

S. De Benedictis

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

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Electron energy distribution function in capacitively coupled RF discharges: difference between electropositive Ar and electronegative SiH4discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/9/4/314 ◽

2000 ◽

Vol 9 (4) ◽

pp. 583-591 ◽

Author(s):

M Yan ◽

A Bogaerts ◽

W J Goedheer ◽

R Gijbels

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

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A simple method for theoretical determination of the radius- and time-dependent electron temperatures in nanosecond pulsed longitudinal discharges in helium and neon assuming a bi-Maxwellian electron energy distribution function

Journal of Physics Conference Series ◽

10.1088/1742-6596/1492/1/012009 ◽

2020 ◽

Vol 1492 ◽

pp. 012009

Author(s):

K A Temelkov ◽

S I Slaveeva ◽

T P Chernogorova

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Time Dependent ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Theoretical Determination ◽

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Determination of the cross section of de-excitation of xenon metastables from the structure of the electron energy distribution function

Soviet Physics Journal ◽

10.1007/bf00895369 ◽

1981 ◽

Vol 24 (2) ◽

pp. 177-181

Author(s):

G. S. Evtushenko

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cross Section ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

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Determination of the electron energy distribution function in the ISTTOK tokamak

Journal of Physics Conference Series ◽

10.1088/1742-6596/514/1/012050 ◽

2014 ◽

Vol 514 ◽

pp. 012050

Author(s):

M Dimitrova ◽

C Silva ◽

H Fernandes ◽

P Duarte ◽

Tsv K Popov ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/48/2/022001 ◽

2014 ◽

Vol 48 (2) ◽

pp. 022001

Author(s):

Sung-Ryul Huh ◽

Nam-Kyun Kim ◽

Hyun-Joon Roh ◽

Myung-Sun Choi ◽

Seok-Hwan Lee ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

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Determination of the Electron Energy Distribution Function From Langmuir Probe Characteristics Using Non-Recursive Digital Filters

Contributions to Plasma Physics ◽

10.1002/ctpp.201310008 ◽

2013 ◽

Vol 53 (1) ◽

pp. 45-50 ◽

Author(s):

M. Hannemann

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Digital Filters ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Recursive Digital Filters

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Time resolved determination of the electron energy distribution function in a DC pulsed plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/5/3/024 ◽

1996 ◽

Vol 5 (3) ◽

pp. 553-559 ◽

Author(s):

Robert Hugon ◽

Gérard Henrion ◽

Michel Fabry

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Pulsed Plasma ◽

Electron Energy Distribution ◽

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Langmuir probe in magnetized plasma: Determination of the electron diffusion parameter and of the electron energy distribution function

Contributions to Plasma Physics ◽

10.1002/ctpp.201900067 ◽

2019 ◽

Vol 60 (2) ◽

pp. e201900067

Author(s):

Jean-Louis Jauberteau ◽

Isabelle Jauberteau ◽

O. Daniel Cortázar ◽

Ana Megía-Macías

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Magnetized Plasma ◽

Energy Distribution Function ◽

Diffusion Parameter ◽

Electron Energy Distribution

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