Electron energy distribution function in capacitively coupled RF discharges: difference between electropositive Ar and electronegative SiH4discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/9/4/314 ◽

2000 ◽

Vol 9 (4) ◽

pp. 583-591 ◽

Author(s):

M Yan ◽

A Bogaerts ◽

W J Goedheer ◽

R Gijbels

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

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Electron‐energy distribution function measurements in capacitively coupled rf discharges

Journal of Applied Physics ◽

10.1063/1.348935 ◽

1991 ◽

Vol 69 (1) ◽

pp. 121-128 ◽

Author(s):

G. Dilecce ◽

M. Capitelli ◽

S. De Benedictis

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

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Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

Physics of Plasmas ◽

10.1063/1.5031221 ◽

2018 ◽

Vol 25 (6) ◽

pp. 063501 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Excitation Frequency ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Argon Discharge

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Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Physics of Plasmas ◽

10.1063/1.4967356 ◽

2016 ◽

Vol 23 (11) ◽

pp. 110701 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

P. K. Kaw ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Driving Frequency ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Problems in the Experimental Determination of Electron Energy Distribution Function in RF Discharges

Nonequilibrium Processes in Partially Ionized Gases - NATO ASI Series ◽

10.1007/978-1-4615-3780-9_34 ◽

1990 ◽

pp. 451-458

Author(s):

G. Dilecce ◽

M. Capitelli ◽

S. De Benedictis ◽

C. Gorse

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Experimental Determination ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

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Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/4/045009 ◽

2012 ◽

Vol 21 (4) ◽

pp. 045009 ◽

Author(s):

Xi-Ming Zhu ◽

Wen-Cong Chen ◽

Jiang Li ◽

Zhi-Wen Cheng ◽

Yi-Kang Pu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Spatial Evolution ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Optical diagnostics for the highly populated tail of an electron energy distribution function in very-high-frequency capacitively coupled plasma using spin- and dipole-forbidden lines

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aa6cf8 ◽

2017 ◽

Vol 50 (22) ◽

pp. 225201 ◽

Author(s):

Hyun-Joon Roh ◽

Nam-Kyun Kim ◽

Sangwon Ryu ◽

Yunchang Jang ◽

Gon-Ho Kim

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Very High Frequency ◽

Capacitively Coupled ◽

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Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF source

Acta Physica Sinica ◽

10.7498/aps.57.6465 ◽

2008 ◽

Vol 57 (10) ◽

pp. 6465

Author(s):

Sun Kai ◽

Xin Yu ◽

Huang Xiao-Jiang ◽

Yuan Qiang-Hua ◽

Ning Zhao-Yuan

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Investigation of the Electron Energy Distribution Function in Capacitively Coupled (13.56 MHz) Radio Frequency Discharge in Dry Air

Rafidain Journal of Science ◽

10.33899/rjs.2013.80284 ◽

2013 ◽

Vol 24 (11) ◽

pp. 82-95

Author(s):

Haitham A. Al-Rawachy ◽

Heba T. Al-Saoor

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Dry Air ◽

Radio Frequency Discharge

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Apparatus for the electron energy distribution function measurement in the afterglow discharge

Czechoslovak Journal of Physics ◽

10.1007/bf01589560 ◽

1977 ◽

Vol 27 (9) ◽

pp. 1027-1033 ◽

Author(s):

M. Tichý

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Function Measurement

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Electron energy distribution function in the collisional-radiative model of an argon plasma

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/18/3/005 ◽

1985 ◽

Vol 18 (3) ◽

pp. 347-358 ◽

Author(s):

J Vlcek ◽

V Pelikan

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Collisional Radiative Model ◽

Radiative Model

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