Electron‐energy distribution function measurements in capacitively coupled rf discharges
2000 ◽
Vol 9
(4)
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pp. 583-591
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2012 ◽
Vol 21
(4)
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pp. 045009
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2017 ◽
Vol 50
(22)
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pp. 225201
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1977 ◽
Vol 27
(9)
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pp. 1027-1033
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1985 ◽
Vol 18
(3)
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pp. 347-358
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