Radiation Detection Using n-Type 4H-SiC Epitaxial Layer Surface Barrier Detectors

2021 ◽  
pp. 183-209
Author(s):  
Sandeep K. Chaudhuri ◽  
Krishna C. Mandal
Keyword(s):  
Epitaxial Layer ◽  
Radiation Detection ◽  
Surface Barrier ◽  
Layer Surface ◽  
Barrier Detectors

Wide (0001) terrace formation due to step bunching on a vicinal 4H-SiC (0001) epitaxial layer surface

2017 ◽  
Vol 122 (7) ◽  
pp. 075702 ◽  
Author(s):  
Yuki Tabuchi ◽  
Koji Ashida ◽  
Masashi Sonoda ◽  
Tadaaki Kaneko ◽  
Noboru Ohtani ◽  
...  
Keyword(s):  
Epitaxial Layer ◽  
Layer Surface ◽  
Step Bunching

Control of the Surface Morphology on Low Off Angled 4H-SiC Homoepitaxal Growth

2009 ◽  
Vol 615-617 ◽  
pp. 113-116 ◽  
Author(s):  
Kazutoshi Kojima ◽  
Hajime Okumura ◽  
Kazuo Arai
Keyword(s):  
Surface Morphology ◽  
Epitaxial Growth ◽  
Epitaxial Layer ◽  
Flow Rate ◽  
Growth Conditions ◽  
Layer Surface ◽  
Specular Surface ◽  
Homoepitaxial Growth ◽  
Angle Difference ◽  
The Face

We have carried out detailed investigations on the influence of the growth conditions and the wafer off angle on the surface morphology of low off angle homoepitaxial growth. We found triangular features to be also serious problems on a 4 degree off 4H-SiC Si-face epitaxial layer surface. The control of the C/Si ratio by controlling the SiH4 flow rate is effective in suppressing the triangular features on 4 degree off Si-face homoepitaxial layer. As regards epitaxial growth on a vicinal off-axis substrate, the small off angle difference of a tenth part of a degree has an influence on the surface morphology of the epitaxial layer. This tendency depends on the face polarity and a C-face can be obtained that has a specular surface with a lower vicinal off angle than a Si-face. By controlling this off angle, a specular surface morphology without a bunched step structure could be obtained on a vicinal off angle 4H-SiC Si-face.

Plasma Delays in Surface Barrier Detectors

1980 ◽  
Vol 27 (1) ◽  
pp. 286-289 ◽  
Author(s):  
E. C. Finch ◽  
C. F. G. Delaney ◽  
M. Asghar
Keyword(s):  
Surface Barrier ◽  
Barrier Detectors

Rectifying Process in Surface Barrier Detectors

1964 ◽  
Vol 11 (3) ◽  
pp. 244-248 ◽  
Author(s):  
P. Siffert ◽  
A. Coche ◽  
G. Laustriat
Keyword(s):  
Surface Barrier ◽  
Barrier Detectors

Timing of pulses from surface barrier detectors

1969 ◽  
Vol 69 (2) ◽  
pp. 225-228 ◽  
Author(s):  
W.-D. Emmerich ◽  
A. Hofmann ◽  
R. Stock
Keyword(s):  
Surface Barrier ◽  
Barrier Detectors
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