Radiation Thermometry—Sources of Uncertainty During Contactless Temperature Measurement

Author(s):  
Denise Reichel ◽  
T. Schumann ◽  
W. Skorupa ◽  
W. Lerch ◽  
J. Gelpey
Author(s):  
Chang-Da Wen

Experiments were first conducted to measure the spectral normal emissivity values of a variety of aluminum alloys at 600, 700, and 800 K. Multispectral radiation thermometry (MRT) using linear emissivity models (LEM) and log-linear emissivity models (LLE) were then applied to predict surface temperature. Results show that the spectral emissivity decreases with increasing wavelength and increases with increasing temperature. Alloy effect becomes evident at higher temperature. The surface oxidation becomes fully-developed after the first hour heating and results in constant emissivity. Half of temperature predictions by MRT emissivity models provide the absolute temperature error under 10% and a quarter if the results are under 5%. The better emissivity model to suitably represent the real surface emissivity behaviors the more accurate inferred temperature by MRT can be achieved. Increasing the order of emissivity model and increasing the number of wavelengths cannot improve temperature measurement accuracy. More accurate temperature measurement by MRT can be achieved at higher temperature. Overall, three emissivity models give good results most frequently and provide the best compensation for different alloys, the number of wavelengths, and temperatures.


2007 ◽  
Vol 18 (11) ◽  
pp. 3409-3416 ◽  
Author(s):  
J Pujana ◽  
L del Campo ◽  
R B Pérez-Sáez ◽  
M J Tello ◽  
I Gallego ◽  
...  

2014 ◽  
Vol 78 ◽  
pp. 132-144 ◽  
Author(s):  
Baisheng Nie ◽  
Xueqiu He ◽  
Chen Zhang ◽  
Xiangchun Li ◽  
Hailong Li

Measurement ◽  
2001 ◽  
Vol 30 (3) ◽  
pp. 211-221 ◽  
Author(s):  
G. Neuer ◽  
J. Fischer ◽  
F. Edler ◽  
R. Thomas

2000 ◽  
Author(s):  
Y. H. Zhou ◽  
Y. J. Shen ◽  
Z. M. Zhang ◽  
B. K. Tsai ◽  
D. P. DeWitt

Abstract This work employs a Monte Carlo method to study the radiative process in a rapid thermal processing (RTP) furnace. A “true” effective emissivity, accounting for the directional optical properties, is defined and predicted in order to determine the wafer temperature from the measured spectral radiance temperature using light-pipe radiation thermometry. The true effective emissivity is the same as the hemispherical effective emissivity for diffuse wafers, in which case the Monte Carlo model gives the same results as the net-radiation method. Deviations exist between the hemispherical effective emissivity and the true effective emissivity for specular wafers because the effective emissivity is directional dependent. This research will help reduce the uncertainty in the temperature measurement for RTP furnaces to meet the future requirements for integrated circuit manufacturing.


Eos ◽  
2020 ◽  
Vol 101 ◽  
Author(s):  
Kate Wheeling

Researchers identify the main sources of uncertainty in projections of global glacier mass change, which is expected to add about 8–16 centimeters to sea level, through this century.


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