Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays

2005 ◽  
Vol 490-491 ◽  
pp. 661-666
Author(s):  
Mitsuhiko Hataya ◽  
Hanabusa Takao ◽  
Kazuya Kusaka ◽  
Kikuo Tominaga ◽  
Tatsuya Matsue ◽  
...  
Author(s):  
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Takao Hanabusa ◽  
Kazuya Kusaka ◽  
Kikuo Tominaga ◽  
Tatsuya Matsue ◽  
...  

2012 ◽  
Vol 520 (6) ◽  
pp. 2073-2076 ◽  
Author(s):  
Xu Song ◽  
Kong Boon Yeap ◽  
Jing Zhu ◽  
Jonathan Belnoue ◽  
Marco Sebastiani ◽  
...  

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