Monolithic Integrated Pressure Sensor ICs

2000 ◽  
pp. 39-45 ◽  
Author(s):  
V. Gussmann
Keyword(s):  
Pressure Sensor

Noninvasive Monitoring of Arterial Viscoelastic Indices Using a Foil-type Pressure Sensor

2011 ◽  
Vol 131 (9) ◽  
pp. 1518-1527
Author(s):  
Hiromi Maruyama ◽  
Harutoyo Hirano ◽  
Abdugheni Kutluk ◽  
Toshio Tsuji ◽  
Osamu Fukuda ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Noninvasive Monitoring ◽  
Type Pressure

Pressure Sensor Monolithically Integrating MEMS and CMOS-LSI with CMOS Compatible “Back-end-of-line MEMS processes”

2010 ◽  
Vol 130 (5) ◽  
pp. 170-175
Author(s):  
Tsukasa Fujimori ◽  
Hideaki Takano ◽  
Yuko Hanaoka ◽  
Yasushi Goto
Keyword(s):  
Pressure Sensor ◽  
Cmos Compatible

Metal Strain Gauge Pressure Sensor Using SiO2/Si3N4 Diaphragm

2019 ◽  
Vol 139 (4) ◽  
pp. 63-68
Author(s):  
Hiroshi Nakano ◽  
Masahiro Matsumoto ◽  
Yasuo Onose ◽  
Kazuhiro Ohta
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Gauge Pressure ◽  
Metal Strain

INNOVATIVE FOOT PRESSURE SENSOR DESIGN FOR HUMANOID ROBOTS

2019 ◽  
Author(s):  
FRANCISCO ARTHUR BONFIM AZEVEDO ◽  
Daniela Vacarini de Faria ◽  
Marcos Maximo ◽  
Mauricio Donadon
Keyword(s):  
Pressure Sensor ◽  
Humanoid Robots ◽  
Sensor Design ◽  
Foot Pressure

CREATING AN OVER PRESSURE SENSOR METRAN-43 DI WITH THE KOMPAS-3D PROGRAM

2019 ◽  
Author(s):  
Roman Grishin ◽  
Dmitriy Nesnov
Keyword(s):  
Pressure Sensor ◽  
Three Dimensional ◽  
Dimensional Model ◽  
Three Dimensional Model ◽  
Graphic Editor ◽  
The Creation ◽  
Photorealistic Images

This article describes the creation of a three-dimensional model of the overpressure sensor Metran-43 using the graphic editor COMPASS-v17, as well as photorealistic images in the program Artisan Rendering and created animation disassembly-Assembly of the device, allowing you to see the internal components of the product.

Fabrication of a Micro Pressure Sensor Using IC Process Technologies.

Shinku ◽  
1991 ◽  
Vol 34 (12) ◽  
pp. 872-875
Author(s):  
Susumu SUGIYAMA ◽  
Keiichi SHIMAOKA ◽  
Osamu TABATA
Keyword(s):  
Pressure Sensor

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

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