MANUFACTURING TECHNOLOGY OF THE SEMICONDUCTOR SENSITIVE ELEMENT OF THE PRESSURE SENSOR BASED POLYCRYSTALLINE DIAMOND

Author(s):  
K. Y. Kraynova ◽  
Sensor Review ◽  
2020 ◽  
Vol 40 (5) ◽  
pp. 529-534
Author(s):  
Igor S. Nadezhdin ◽  
Aleksey G. Goryunov

Purpose Differential pressure is an important technological parameter, one urgent task of which is control and measurement. To date, the lion’s share of research in this area has focused on the development and improvement of differential pressure sensors. The purpose of this paper is to develop a smart differential pressure sensor with improved operational and metrological characteristics. Design/methodology/approach The operating principle of the developed pressure sensor is based on the capacitive measurement principle. The measuring unit of the developed pressure sensor is based on a differential capacitive sensitive element. Programmable system-on-chip (PSoC) technology has been used to develop the electronics unit. Findings The use of a differential capacitive sensitive element allows the unit to compensate for the influence of interference (for example, temperature) on the measurement result. With the use of PSoC technology, it is also possible to increase the noise immunity of the developed smart differential pressure sensor and provide an unparalleled combination of flexibility and integration of analog and digital functionality. Originality/value The use of PSoC technology in the developed smart differential pressure sensor has many indisputable advantages, as the size of the entire circuit can be minimized. As a result, the circuit has improved noise immunity. Accordingly, the procedure for debugging and changing the software of the electronics unit is simplified. These features make development and manufacturing cost effective.


2010 ◽  
Author(s):  
V. I. Ruiz-Pérez ◽  
M. A. Basurto-Pensado ◽  
D. May-Arrioja ◽  
J. J. Sánchez Mondragón ◽  
P. LiKamWa

2007 ◽  
Vol 127 (2) ◽  
pp. 96-101 ◽  
Author(s):  
Kazuyuki Mishima ◽  
Ryotaro Mori ◽  
Kohro Takahashi

2021 ◽  
Author(s):  
Mikhail ◽  
Denis Prigodskiy

The paper describes modeling of high-sensitivity MEMS pressure sensor based on a circuit containing both active and passive stress-sensitive elements: a differential amplifier utilizing two n-p-n transistors and four p-type piezoresistors. The analysis on the basis of the developed mathematical model for a pressure sensor with traditional piezoresistive Wheatstone bridge and theoretical conclusions regarding the change in the electrical parameters of a bipolar transistor under the influence of deformation was carried out.


Author(s):  
Petr A. Velmisov ◽  
Yuliya A. Tamarova

The article discusses the initial-boundary value problems for systems of differential equations, which are mathematical models of the mechanical system "pipeline - pressure sensor that is designed to measure pressure in gas-liquid media. On the basis of the proposed models, the joint dynamics of the pressure sensor sensitive element and of the working medium in the pipeline connecting the sensor to the combustion chamber of the engine is investigated. To describe the movement of the working medium, linear models of the mechanics of liquid and gas are used; to describe the dynamics of the sensitive element, both linear and nonlinear models of the mechanics of a solid deformable body are used. The solutions of stated initial-boundary value problems are carried out on the basis of the Galerkin method and the finite-difference method.


2022 ◽  
Vol 355 ◽  
pp. 01026
Author(s):  
Sikang Cai ◽  
Guicong Wang ◽  
Yingjun Li ◽  
Xiaoqi Yang

The high-frequency dynamic piezoelectric pressure sensor has the advantages of simple structure, long service life, high natural frequency, excellent signal-to-noise ratio and great sensitivity. It is appropriate for measuring high dynamic, dynamic or quasi-static pressure changes and pressure fluctuations. And this kind of sensor is widely utilized in the shock wave testing. The force-sensitive element is one of the main factors affecting the static and dynamic performance of piezoelectric pressure sensors. Basing on the piezoelectric equation and coupling effect between mechanics and electricity, in this paper, the finite element model of the high-frequency dynamic piezoelectric pressure sensor is established. The influences of the force-sensing element on the sensitivity of the sensor are analysed. Referential suggestions for choosing force-sensitive element of high-frequency dynamic piezoelectric pressure sensor are provided.


2005 ◽  
Vol 14 (3-7) ◽  
pp. 657-660 ◽  
Author(s):  
Akira Yamamoto ◽  
Norio Nawachi ◽  
Takahiro Tsutsumoto ◽  
Akira Terayama

1995 ◽  
Vol 4 (1) ◽  
pp. 34-41 ◽  
Author(s):  
D.R. Wur ◽  
J.L. Davidson ◽  
Weng Poo Kang ◽  
D.L. Kinser

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