Research on a Novel Thermoelectric Generator Module Made of Bismuth Telluride

Author(s):  
Zheng Zhang ◽  
Yushan Chen
2015 ◽  
Vol 9 (6) ◽  
pp. 612-618
Author(s):  
Mizue Mizoshiri ◽  
◽  
Masashi Mikami ◽  
Kimihiro Ozaki ◽  

This paper describes the process of fabricating micro thermoelectric generators (μ-TEGs) based on antimony telluride (Sb-Te) and bismuth telluride (Bi-Te). These materials have excellent thermoelectric (TE) conversion properties. The deposition and patterning processes for thermoelectric films are key techniques in the fabrication of μ-TEGs. However, it is difficult to form TE micropatterns using conventional semiconductor technologies because Sb-Te and Bi-Te are brittle and difficult to etch. Therefore, a semiconductor fabrication process is developed for TE film patterning. Here, various processes for depositing Sb-Te and Bi-Te TE films are described. Then, the combinations of the deposition and patterning techniques are reviewed. Finally, the generation properties of the μ-TEGs are summarized.


2019 ◽  
Vol 2019 (0) ◽  
pp. 0077
Author(s):  
Junjie Peng ◽  
Minhyeok Lee ◽  
Yong Fan ◽  
Atsushi Yamamoto ◽  
Yuji Suzuki

2009 ◽  
Vol 39 (9) ◽  
pp. 2092-2095 ◽  
Author(s):  
D. Samson ◽  
T. Otterpohl ◽  
M. Kluge ◽  
U. Schmid ◽  
Th. Becker

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