A Regional Strategy for Energy Efficiency — with special reference to the Co-Operation between Denmark and Schleswig-Holstein

Author(s):  
Klaus Rave
1998 ◽  
Vol 544 ◽  
Author(s):  
Yuliang WU ◽  
Licheng M. Han ◽  
Brett E. Thomes ◽  
Haibo Qiu ◽  
Charles R. Savage ◽  
...  

AbstractFilm chemistry control issues, as well as key properties of polymers synthesized under pulsed plasma conditions, are discussed. Distinctions between pulsed and continuous wave plasmas are examined, particularly as they relate to differences in the energy efficiency of film formation rates and to the range of available power inputs. Film stabilities, with special reference to polymers formed under very low power input conditions, are considered. Finally, selected applications involving use of the inherently high film chemistry controllability made available by the variable duty cycle pulsed plasma technique are described.


Sign in / Sign up

Export Citation Format

Share Document