Inductively Coupled Plasma Torches

Author(s):  
Rachid Touzani ◽  
Jacques Rappaz
1987 ◽  
Vol 98 ◽  
Author(s):  
John W. Mckelliget ◽  
Nagy El-Kaddah

ABSTRACTA mathematical model for the analysis and design of inductively coupled plasma torches Is presented. The model is based upon a solution of the electromagnetic vector potential equation and is capable of predicting the two-dimensional velocity, temperature, and electromagnetic fields as well as the reaction kinetics inside the torch for any axi-symmetric coil configuration. The model is used to study the effect of coil geometry on the thermal decomposition of silicon tetrachloride to silicon. The coil geometry Is found to affect both the temperature field and the flow field and to have a significant effect on the reaction kinetics in the torch. It is demonstrated that through fundamental changes in the coil design It is possible to control the location of the reaction zone and to prevent silicon deposition on the wall of the reactor.


1979 ◽  
Vol 51 (14) ◽  
pp. 2392-2394 ◽  
Author(s):  
Charly D. Allemand ◽  
Ramon M. Barnes ◽  
Charles C. Wohlers

1986 ◽  
Vol 40 (2) ◽  
pp. 265-270 ◽  
Author(s):  
L. L. Burton ◽  
M. W. Blades

FeI excitation temperatures have been measured for both conventional and low-flow, low-power ICP torches. Temperatures were measured from 0 to ± 6 mm radial position at 4, 8, 12, 16, and 20 mm above the load coil. In addition, radial and vertical spatial emission profiles for FeI and FeII have been measured for both torches. The results indicate that the gas flow dynamics are different for the two torches and this in turn creates a different excitation environment for each torch.


2005 ◽  
Vol 77 (2) ◽  
pp. 359-372 ◽  
Author(s):  
D. Bernardi ◽  
V. Colombo ◽  
E. Ghedini ◽  
A. Mentrelli

A 3D model for the simulation of inductively coupled plasma torches (ICPTs) working at atmospheric pressure is presented, using a customized version of the computational fluid dynamics (CFD) commercial code FLUENT®. The induction coil is taken into account in its actual 3D shape, showing the effects on the plasma discharge of removing the axisymmetric hypothesis of simplification, which characterizes 2D approaches. Steady flow and energy equations are solved for optically thin argon plasmas under the assumptions of local thermodynamic equilibrium (LTE) and laminar flow. The electromagnetic field equations are solved on an extended grid in the vector potential form. In order to evaluate the importance of various 3D effects on calculated plasma temperature and velocity fields, comparisons of our new results with the ones obtainable from 2D models and from an improved 2D model that includes 3D coil effects are presented. 3D results are shown for torches working under various geometric and operating conditions and with different coil shapes, including conventional helicoidal, as well as planar, elliptical, and double-stage configurations.


2005 ◽  
Vol 33 (2) ◽  
pp. 424-425 ◽  
Author(s):  
D. Bernardi ◽  
V. Colombo ◽  
E. Ghedini ◽  
A. Mentrelli ◽  
T. Trombetti

2004 ◽  
Vol 54 (S3) ◽  
pp. C489-C515 ◽  
Author(s):  
V. Colombo ◽  
D. Bernardi ◽  
E. Ghedini ◽  
A. Mentrelli ◽  
T. Trombetti

2019 ◽  
Author(s):  
Savio J. Poovathingal ◽  
Juliusz Kruszelnicki ◽  
Iain D. Boyd ◽  
Mark J. Kushner

2015 ◽  
Vol 30 (2) ◽  
pp. 360-367 ◽  
Author(s):  
Konstantin Yu. Nagulin ◽  
Damir Sh. Akhmetshin ◽  
Albert Kh. Gilmutdinov ◽  
Rinat A. Ibragimov

A three-dimensional, non-stationary model has been developed for simulating the behavior of pure Ar inductively coupled plasma (ICP) torches.


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