Comparison of different techniques for the FLUENT $^{\copyright}$ -based treatment of the electromagnetic field in inductively coupled plasma torches

2003 ◽  
Vol 27 (1) ◽  
pp. 55-72 ◽  
Author(s):  
D. Bernardi ◽  
V. Colombo ◽  
E. Ghedini ◽  
A. Mentrelli
Keyword(s):  
Electromagnetic Field ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Plasma Torches

Theoretical Prediction of the Effect of Coil Configuration on Gas Mixing in an Inductively Coupled Plasma Torch

1987 ◽  
Vol 98 ◽  
Author(s):  
John W. Mckelliget ◽  
Nagy El-Kaddah
Keyword(s):  
Reaction Kinetics ◽  
Inductively Coupled Plasma ◽  
Plasma Torch ◽  
Coil Design ◽  
Potential Equation ◽  
Analysis And Design ◽  
Inductively Coupled ◽  
Plasma Torches ◽  
Coil Geometry ◽  
Electromagnetic Vector Potential

ABSTRACTA mathematical model for the analysis and design of inductively coupled plasma torches Is presented. The model is based upon a solution of the electromagnetic vector potential equation and is capable of predicting the two-dimensional velocity, temperature, and electromagnetic fields as well as the reaction kinetics inside the torch for any axi-symmetric coil configuration. The model is used to study the effect of coil geometry on the thermal decomposition of silicon tetrachloride to silicon. The coil geometry Is found to affect both the temperature field and the flow field and to have a significant effect on the reaction kinetics in the torch. It is demonstrated that through fundamental changes in the coil design It is possible to control the location of the reaction zone and to prevent silicon deposition on the wall of the reactor.

Experimental study of reduced size inductively coupled plasma torches

1979 ◽  
Vol 51 (14) ◽  
pp. 2392-2394 ◽  
Author(s):  
Charly D. Allemand ◽  
Ramon M. Barnes ◽  
Charles C. Wohlers
Keyword(s):  
Experimental Study ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Plasma Torches

A Comparison of Excitation Conditions between Conventional and Low-Flow, Low-Power Inductively Coupled Plasma Torches

1986 ◽  
Vol 40 (2) ◽  
pp. 265-270 ◽  
Author(s):  
L. L. Burton ◽  
M. W. Blades
Keyword(s):  
Low Power ◽  
Inductively Coupled Plasma ◽  
Gas Flow ◽  
Flow Dynamics ◽  
Radial Position ◽  
Low Flow ◽  
Inductively Coupled ◽  
Plasma Torches ◽  
Excitation Conditions

FeI excitation temperatures have been measured for both conventional and low-flow, low-power ICP torches. Temperatures were measured from 0 to ± 6 mm radial position at 4, 8, 12, 16, and 20 mm above the load coil. In addition, radial and vertical spatial emission profiles for FeI and FeII have been measured for both torches. The results indicate that the gas flow dynamics are different for the two torches and this in turn creates a different excitation environment for each torch.

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