Monoatomic Ion Rich DECR Plasmas for Ion Implantation by Plasma Immersion Using a New High Voltage — High Current Pulse Generator
1999 ◽
pp. 493-494
1999 ◽
Vol 17
(2)
◽
pp. 879
◽
2019 ◽
Vol 40
(12)
◽
pp. 1965-1968
◽
1976 ◽
Vol 47
(6)
◽
pp. 767-769
◽
1967 ◽
Vol 38
(6)
◽
pp. 835-837
◽
1963 ◽
Vol 34
(8)
◽
pp. 932-933
◽
2007 ◽
Vol 50
(2)
◽
pp. 221-223
Keyword(s):
Keyword(s):