New line of high voltage high current pulse generators for plasma-based ion implantation

The circuit of modulator, serving to supply inductive-resistive load in double-pulse mode with currents up to 10 kA and pulse duration of 300 ns, is described. As switching components unheated cathode thyratrons (pseudospark switches) TPI1-10k/50 and TPI5-10k/50 with anode voltage up to 50 kV have been used. The results of tests, confirming possibility of the thyratron reverse dielectric strength recovery within some microseconds after switching of 10 kA forward anode current, are presented.

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Progress on high-voltage pulse generators, using low voltage semiconductors (<1 kV), designed for plasma immersion ion implantation (PIII)

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00113-5 ◽

2002 ◽

Vol 156 (1-3) ◽

pp. 61-65 ◽

Cited By ~ 4

Author(s):

L.M Redondo ◽

N Pinhão ◽

E Margato ◽

J Fernando Silva

Keyword(s):

Ion Implantation ◽

High Voltage ◽

Voltage Pulse ◽

Low Voltage ◽

High Voltage Pulse ◽

Pulse Generators ◽

Plasma Immersion Ion Implantation

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High-voltage / high-current pulse power for civil, commercial, research, and military test applications - part IV: pulse magnetic welding

2007 IEEE Pulsed Power Plasma Science Conference ◽

10.1109/ppps.2007.4651938 ◽

2007 ◽

Cited By ~ 1

Author(s):

A. Izhar ◽

Y. Livshiz ◽

Oren Gafri

Keyword(s):

Current Pulse ◽

High Voltage ◽

Pulse Power ◽

High Current ◽

Commercial Research

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Design of a synchronization system for the “Gamma-4” electrophysical facility

International Journal of Modern Physics Conference Series ◽

10.1142/s2010194514603330 ◽

2014 ◽

Vol 32 ◽

pp. 1460333

Author(s):

A. V. Grishin ◽

S. L. Glushkov ◽

B. P. Mironychev ◽

D. A. Kalashnikov ◽

A. V. Kozachek ◽

...

Keyword(s):

High Voltage ◽

Operating Voltage ◽

High Current ◽

Synchronization System ◽

Pulse Generators ◽

Distributed Parameters ◽

Voltage Pulses

At RFNC-VNIIEF on the basis of a “Gamma-1” high-current pulsed accelerator there is being developed a four-module “Gamma-4” electrophysical facility. A synchronization system of the "Gamma-4" facility is meant for a simultaneous (with precision not worse than ±3 ns) triggering of high-volt gas-filled trigatron type switches of modules' pulse forming systems (144 items, operating voltage ≤ 1 MV), modules' pre-pulse switches (24 items, ≤ 3 MV) and 8 Marx generators (40 items, ≤ 100 kV). The synchronization system comprises 54 pulse generators, involving 25 generators on the basis of water insulated forming lines with distributed parameters and multi-channel gas-filled switches. On matched cable loads with resistances 0.45 Ohm these generators form voltage pulses with amplitudes 100 kV with durations 25 ns. A jitter of switches of these generators does not exceed ± 2 ns. To raise the amplitude of pulse drivers of pulse forming system switches and pre-pulse switches of modules in the facility synchronization system there are used step-up transformers based on pulsed high-voltage cables.

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