High-voltage microsecond pulse generator for plasma immersion ion implantation
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1999 ◽
Vol 112
(1-3)
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pp. 29-33
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1996 ◽
Vol 67
(7)
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pp. 2621-2625
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2001 ◽
Vol 135
(2-3)
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pp. 178-183
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2010 ◽
Vol 81
(12)
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pp. 124703
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1999 ◽
Vol 17
(2)
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pp. 895
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2002 ◽
Vol 326
(2)
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pp. 348-354
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2002 ◽
Vol 156
(1-3)
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pp. 61-65
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