Radio Frequency Planar Inductively Coupled Plasma: Fundamentals and Applications

2017 ◽  
pp. 527-591
Author(s):  
Kanesh Kumar Jayapalan ◽  
Oi Hoong Chin ◽  
Chiow San Wong
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled

scholarly journals Experimental studies on the properties of the discharge modes in a cylindrical radio frequency inductively coupled plasma

2008 ◽  
Vol 57 (7) ◽  
pp. 4304
Author(s):  
Ding Zhen-Feng ◽  
Yuan Guo-Yu ◽  
Gao Wei ◽  
Sun Jing-Chao
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Experimental Studies ◽  
Inductively Coupled

Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

1997 ◽  
Vol 68 (6) ◽  
pp. 2381-2383 ◽  
Author(s):  
K. Eng ◽  
K. Strohmaier ◽  
R. Palmer ◽  
B. Stoner ◽  
S. Washburn
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled

CVD of hard DLC films in a radio frequency inductively coupled plasma source

2001 ◽  
Vol 390 (1-2) ◽  
pp. 98-103 ◽  
Author(s):  
S.J Yu ◽  
Z.F Ding ◽  
J Xu ◽  
J.L Zhang ◽  
T.C Ma
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Inductively Coupled
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