Synthesis and microstructural characterization of nanoscale multilayer TiAlN/TaN coatings deposited by DC magnetron sputtering

2018 ◽  
Vol 101 (1-4) ◽  
pp. 663-673
Author(s):  
Elbert Contreras ◽  
Gilberto Bejarano ◽  
Maryory Gómez
Keyword(s):  
Magnetron Sputtering ◽  
Microstructural Characterization ◽  
Dc Magnetron Sputtering

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Deposition and Characterization of Aluminium Thin film Coatings using DC Magnetron Sputtering Process

2018 ◽  
Vol 5 (1) ◽  
pp. 2696-2704 ◽  
Author(s):  
M. Muralidhar Singh ◽  
G. Vijaya ◽  
M.S. Krupashankara ◽  
B.K. Sridhara ◽  
T.N. Shridhar
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Film Coatings ◽  
Thin Film Coatings

Deposition and characterization of phase-pure Ti 2 AlC and Ti 3 AlC 2 coatings by DC magnetron sputtering with cost-effective targets

Vacuum ◽  
2018 ◽  
Vol 153 ◽  
pp. 62-69 ◽  
Author(s):  
Yueming Li ◽  
Guorui Zhao ◽  
Yuhai Qian ◽  
Jingjun Xu ◽  
Meishuan Li
Keyword(s):  
Magnetron Sputtering ◽  
Cost Effective ◽  
Dc Magnetron Sputtering ◽  
Phase Pure

Preparation and Characterization of Cerium-Doped ITO Films Deposited by DC Magnetron Sputtering

2009 ◽  
Vol 54 (3) ◽  
pp. 1297-1301 ◽  
Author(s):  
Se-Il Kim ◽  
Sang-Hyun Cho ◽  
Pung-Keun Song ◽  
Jin-Ho Lee ◽  
Sung-Ryong Choi ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Ito Films

Growth and Characterization of Epitaxial Wurtzite Al1-xInxN Thin Films Deposited by UHV Reactive Dual DC Magnetron Sputtering

2003 ◽  
Vol 433-436 ◽  
pp. 987-990 ◽  
Author(s):  
T. Seppänen ◽  
György Z. Radnóczi ◽  
Sukkaneste Tungasmita ◽  
L. Hultman ◽  
J. Birch
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering

Characterization of YBa2Cu3O7−δ thin films deposited by dc magnetron sputtering

1996 ◽  
Vol 31 (23) ◽  
pp. 6137-6144 ◽  
Author(s):  
Yupu Li ◽  
J. A. Kilner ◽  
J. Thomas ◽  
D. Lacey ◽  
L. F. Cohen ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering

Characterization of Niobium Oxide Films Prepared by Reactive DC Magnetron Sputtering

2001 ◽  
Vol 188 (3) ◽  
pp. 1047-1058 ◽  
Author(s):  
S. Venkataraj ◽  
R. Drese ◽  
O. Kappertz ◽  
R. Jayavel ◽  
M. Wuttig
Keyword(s):  
Magnetron Sputtering ◽  
Niobium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering
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