scholarly journals Experimental study on surface integrity and subsurface damage of fused silica in ultra-precision grinding

2021 ◽  
Author(s):  
Yaoyu Zhong ◽  
Yifan Dai ◽  
Hang Xiao ◽  
Feng Shi
Keyword(s):  
Experimental Study ◽  
Surface Integrity ◽  
Fused Silica ◽  
Subsurface Damage ◽  
Precision Grinding ◽  
Ultra Precision

scholarly journals Experimental Study on Surface Integrity and Subsurface Damage of Fused Silica in Ultra-Precision Grinding

2021 ◽  
Author(s):  
Yaoyu Zhong ◽  
Yifan Dai ◽  
Hang Xiao ◽  
Feng Shi
Keyword(s):  
Surface Roughness ◽  
Plastic Flow ◽  
Material Removal ◽  
Cutting Speed ◽  
Fused Silica ◽  
Subsurface Damage ◽  
Depth Of Cut ◽  
Grinding Wheel ◽  
Precision Grinding ◽  
Ultra Precision

Abstract To realize low-damage ultra-precision grinding on fused silica, the surface quality and subsurface damage (SSD) distribution with fine-grained grinding wheel under different depth-of-cut and cutting speed are experimentally studied. The material removal mechanism under different grinding parameters is revealed by calculating undeformed chip thickness and observed with the help of transmission electron microscopy. The results show that brittle-ductile surfaces and ductile-like surfaces are generated during grinding. With the decrease of depth-of-cut and the increase of wheel cutting speed, the ultra-precision grinding changes to ductile-regime grinding with plastic flow removal. Besides, the surface roughness (SR) and SSD depth are reduced. The fracture defects such as fractured pits and grinding streaks on brittle-ductile surface gradually decrease. Instead, a ductile-like surface covered with grinding streaks is found. On brittle-ductile surfaces, the nonlinear relationship SSD∝SR4/3 is no longer proper under the influence of plastic flow. Using surface roughness Ra to predict SSD depth is more accurate. When depth-of-cut is 1 µm, cutting speed is 23.4 m/s and the material removal mode is dominated by plastic flow removal, the surface Ra is improved to 2.0 nm and there is no crack but only a 3.4 nm deep plastic flow layer in subsurface after grinding.

scholarly journals Surface Integrity in Ultra-Precision Grinding of Transparent Ceramics

Procedia CIRP ◽  
2018 ◽  
Vol 71 ◽  
pp. 177-180 ◽  
Author(s):  
Fritz Klocke ◽  
Olaf Dambon ◽  
Thomas Bletek ◽  
Thomas Höche ◽  
Falk Naumann ◽  
...  
Keyword(s):  
Surface Integrity ◽  
Transparent Ceramics ◽  
Precision Grinding ◽  
Ultra Precision

Thermal Analysis of Laser Irradiation of Fused Silica

2011 ◽  
Vol 314-316 ◽  
pp. 1960-1964 ◽  
Author(s):  
Peng Yao ◽  
Ya Dong Gong ◽  
Suo Xian Yuan ◽  
Tian Feng Zhou ◽  
Ji Wang Yan ◽  
...  
Keyword(s):  
Thermal Analysis ◽  
Surface Roughness ◽  
Laser Irradiation ◽  
Fused Silica ◽  
Maximum Temperature ◽  
Precision Grinding ◽  
Micro Cracks ◽  
Ductile Mode ◽  
Ultra Precision ◽  
Simulation Results

To grind fused silica in ductile mode, surface and subsurface micro cracks (SSMC) on ground fused silica should be repaired by CO2 laser irradiation before ultra-precision grinding. In this paper, 2D thermal analysis of single pass laser irradiation of fused silica was conducted, and the simulation results were discussed by comparing with the experiment results. To repair SSMC and decrease the surface roughness of ground fused silica simultaneously, the maximum temperature on the surface during laser irradiation should be controlled higher than 3280 K and lower than 3550 K.

Ultra-precision grinding of PZT ceramics—Surface integrity control and tooling design

2009 ◽  
Vol 49 (12-13) ◽  
pp. 998-1007 ◽  
Author(s):  
S. Arai ◽  
S.A. Wilson ◽  
J. Corbett ◽  
R.W. Whatmore
Keyword(s):  
Surface Integrity ◽  
Precision Grinding ◽  
Pzt Ceramics ◽  
Ultra Precision ◽  
Tooling Design

Surface Layer Damage of Quartz Glass Induced by Ultra-Precision Grinding with Different Grit Size

2017 ◽  
Vol 872 ◽  
pp. 19-24
Author(s):  
Zong Chao Geng ◽  
Shang Gao ◽  
Ren Ke Kang ◽  
Zhi Gang Dong
Keyword(s):  
Surface Roughness ◽  
Quartz Glass ◽  
Subsurface Damage ◽  
Grinding Wheel ◽  
Precision Grinding ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding ◽  
Roughness Surface ◽  
Ultra Precision ◽  
Damage Depth

Quartz glass is a typical hard and brittle material. During the manufacturing process of quartz glass components, ultra-precision grinding is widely used due to its high throughput and good dimensional accuracies. However, grinding will unavoidably induce large surface and subsurface damage. In this study, the surface and subsurface damage characteristics of quartz glass substrates ground by diamond wheels with different grit sizes were investigated in terms of surface roughness, surface topography, subsurface microcrack characteristic, and subsurface damage depth. Discussion was also provided to explore corresponding reasons of surface and subsurface damage induced by diamond grinding wheels with different grit sizes of #1500 and #2000. The experiment results showed that the surface roughness, surface damage, and subsurface damage depth induced by #2000 quartz glass was ground by #1500 diamond grinding wheel, and in ductile mode when ground by #2000 diamond grinding wheel.

One-Point Nano-Grinding for Micro-Aspherical Glass Lens Mould

2010 ◽  
Vol 97-101 ◽  
pp. 4217-4220 ◽  
Author(s):  
Shao Hui Yin ◽  
Yu Wang ◽  
Yu Feng Fan ◽  
Yong Jian Zhu ◽  
Feng Jun Chen ◽  
...  
Keyword(s):  
Experimental Study ◽  
Error Compensation ◽  
Grinding Process ◽  
Form Error ◽  
Precision Grinding ◽  
Aspherical Lens ◽  
Ultra Precision ◽  
Compensation Technique ◽  
Glass Lens ◽  
Micro Lens

This paper reported an experimental study on ultra-precision grinding for micro aspherical lens mould. One-point grinding mode and inclined axis grinding mode are employed and investigated in grinding process. Grinding test of a micro-lens mould using form error compensation technique is conducted. The experimental results show that ground micro aspheric mould surfaces with form (PV) around 0.122 µm and a roughness (Ra) less than 2 nm is achieved successfully.

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