Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
1986 ◽
Vol 44
◽
pp. 642-643
Keyword(s):
2003 ◽
Vol 74
(8)
◽
pp. 3889-3891
◽
Keyword(s):
2011 ◽
Vol 10
(04n05)
◽
pp. 623-627
◽
Keyword(s):
2009 ◽
Vol 42
(7)
◽
pp. 075502
◽
Keyword(s):
2003 ◽
Vol 74
(1)
◽
pp. 621-623
◽
Keyword(s):