Performance enhancement of GaN-based near-ultraviolet flip-chip light-emitting diodes with two-step insulating layer scheme on patterned sapphire substrate

2019 ◽  
Vol 30 (3) ◽  
pp. 3013-3018 ◽  
Author(s):  
Wen-Jie Liu ◽  
Xiao-Long Hu ◽  
Yi-Jun Liu
2015 ◽  
Vol 54 (11) ◽  
pp. 115108 ◽  
Author(s):  
Zhen Che ◽  
Jun Zhang ◽  
Xinyu Yu ◽  
Mengyuan Xie ◽  
Jianhui Yu ◽  
...  

Micromachines ◽  
2018 ◽  
Vol 9 (12) ◽  
pp. 622 ◽  
Author(s):  
Wen-Yang Hsu ◽  
Yuan-Chi Lian ◽  
Pei-Yu Wu ◽  
Wei-Min Yong ◽  
Jinn-Kong Sheu ◽  
...  

Micron-sized patterned sapphire substrates (PSS) are used to improve the performance of GaN-based light-emitting diodes (LEDs). However, the growth of GaN is initiated not only from the bottom c-plane but also from the sidewall of the micron-sized patterns. Therefore, the coalescence of these GaN crystals creates irregular voids. In this study, two kinds of nucleation layers (NL)—ex-situ AlN NL and in-situ GaN NL—were used, and the growth of sidewall GaN was successfully suppressed in both systems by modifying the micron-sized PSS surface.


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