Fast and scalable phase change materials Ti–Sb–Te deposited by plasma-enhanced atomic layer deposition

2019 ◽  
Vol 31 (8) ◽  
pp. 5833-5837
Author(s):  
Hao Wang ◽  
Sannian Song ◽  
Zhitang Song ◽  
Zhiguo Zhou ◽  
Dongning Yao ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Phase Change ◽  
Phase Change Materials ◽  
Atomic Layer ◽  
Layer Deposition

Improved thermal energy storage of nanoencapsulated phase change materials by atomic layer deposition

2020 ◽  
Vol 206 ◽  
pp. 110322 ◽  
Author(s):  
Nuria Navarrete ◽  
Damiano La Zara ◽  
Aristeidis Goulas ◽  
David Valdesueiro ◽  
Leonor Hernández ◽  
...  
Keyword(s):  
Energy Storage ◽  
Atomic Layer Deposition ◽  
Phase Change ◽  
Thermal Energy ◽  
Thermal Energy Storage ◽  
Phase Change Materials ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Atomic layer deposition and tellurization of Ge–Sb film for phase-change memory applications

RSC Advances ◽  
2019 ◽  
Vol 9 (30) ◽  
pp. 17291-17298 ◽  
Author(s):  
Yewon Kim ◽  
Byeol Han ◽  
Yu-Jin Kim ◽  
Jeeyoon Shin ◽  
Seongyoon Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Phase Change ◽  
Phase Change Memory ◽  
Atomic Layer ◽  
Gap Filling ◽  
Layer Deposition ◽  
Memory Applications ◽  
Change Memory

We studied the atomic layer deposition (ALD) and the tellurization of Ge–Sb films to prepare conformal crystalline Ge–Sb–Te (GST) films and to achieve void-free gap filling for emerging phase-change memory applications.

Phase change properties of Ti-Sb-Te thin films deposited by thermal atomic layer deposition

2016 ◽  
Author(s):  
Sannian Song ◽  
Lanlan Shen ◽  
Zhitang Song ◽  
Dongning Yao ◽  
Tianqi Guo ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Phase Change ◽  
Atomic Layer ◽  
Layer Deposition

Localized phase change of VO2 films grown by atomic-layer deposition on InAlN/AlN/GaN heterostructures

2017 ◽  
Vol 10 (6) ◽  
pp. 061101 ◽  
Author(s):  
Brian P. Downey ◽  
Virginia D. Wheeler ◽  
David J. Meyer
Keyword(s):  
Atomic Layer Deposition ◽  
Phase Change ◽  
Atomic Layer ◽  
Layer Deposition

Atomic Layer Deposition of Materials for Phase-Change Memories

2019 ◽  
Vol 25 (4) ◽  
pp. 399-407 ◽  
Author(s):  
Markku Leskelä ◽  
Viljami Pore ◽  
Timo Hatanpää ◽  
Mikko Heikkilä ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Phase Change ◽  
Atomic Layer ◽  
Layer Deposition

Atomic Layer Deposition of Nanocrystalline-As-Deposited (GeTe)x(Sb2Te3)1–x Films for Endurable Phase Change Memory

2019 ◽  
Vol 31 (21) ◽  
pp. 8752-8763 ◽  
Author(s):  
Eui-Sang Park ◽  
Chanyoung Yoo ◽  
Woohyun Kim ◽  
Manick Ha ◽  
Jeong Woo Jeon ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Phase Change ◽  
Phase Change Memory ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Change Memory
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