Impact of nitrogen reactive gas and substrate temperature on the optical, electrical and structural properties of sputtered TiN thin films

2020 ◽  
Vol 31 (22) ◽  
pp. 20009-20021
Author(s):  
N. Mustapha ◽  
Z. Fekkai
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Structural Properties ◽  
Tin Thin Films ◽  
Reactive Gas

Effects of substrate temperature on dielectric and structural properties of Ti and Er co-doped HfO2 thin films

Vacuum ◽  
2012 ◽  
Vol 86 (12) ◽  
pp. 1920-1923 ◽  
Author(s):  
Murad Ali Khaskheli ◽  
Ping Wu ◽  
Xianfei Li ◽  
Hui Wang ◽  
Shiping Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Structural Properties ◽  
Co Doped

Influence of the substrate temperature on the structure of SrBi2Ta2O9 thin films obtained by laser ablation

1998 ◽  
Vol 541 ◽  
Author(s):  
J. A. Díaz ◽  
M. P. Cruz ◽  
O. E. Contreras ◽  
J. M. Siqueiros ◽  
J. Portelles
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Substrate Temperature ◽  
Structural Properties ◽  
Systematic Study ◽  
Sem And Tem ◽  
Substrate Temperatures

AbstractA systematic study is presented of the resulting SBT films deposited by PLD at substrate temperatures from 300 to 600°C. The characteristics of the film as-deposited are determined. Special attention is focused on the compositional and structural properties. XRD, SEM, and TEM analyses are reported.

Effects of substrate temperature on structural properties of undoped silicon thin films

2002 ◽  
Vol 91 (11) ◽  
pp. 9401-9407 ◽  
Author(s):  
Chandan Das ◽  
Arup Dasgupta ◽  
S. C. Saha ◽  
Swati Ray
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Structural Properties ◽  
Silicon Thin Films
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