Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing

2019 ◽  
Vol 60 (3) ◽  
pp. 329-343 ◽  
Author(s):  
C. Li ◽  
D. Zhang ◽  
G. Cheng ◽  
Y. Zhu
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