Silicon layer transfer using wafer bonding and debonding

2001 ◽  
Vol 30 (7) ◽  
pp. 841-844 ◽  
Author(s):  
Cynthia Colinge ◽  
Brian Roberds ◽  
Brian Doyle
Keyword(s):  
Wafer Bonding ◽  
Silicon Layer ◽  
Layer Transfer

Single-Crystalline Silicon Layer Transfer to a Flexible Substrate Using Wafer Bonding

2010 ◽  
Vol 39 (10) ◽  
pp. 2233-2236 ◽  
Author(s):  
Ki Yeol Byun ◽  
Isabelle Ferain ◽  
Scott Song ◽  
Susan Holl ◽  
Cindy Colinge
Keyword(s):  
Wafer Bonding ◽  
Crystalline Silicon ◽  
Flexible Substrate ◽  
Silicon Layer ◽  
Single Crystalline Silicon ◽  
Layer Transfer ◽  
Single Crystalline

Low-Temperature Direct CVD Oxides to Thermal Oxide Wafer Bonding in Silicon Layer Transfer

2005 ◽  
Vol 8 (1) ◽  
pp. G1 ◽  
Author(s):  
C. S. Tan ◽  
K. N. Chen ◽  
A. Fan ◽  
R. Reif
Keyword(s):  
Low Temperature ◽  
Wafer Bonding ◽  
Silicon Layer ◽  
Layer Transfer ◽  
Thermal Oxide

High-density-plasma (HDP)-CVD oxide to thermal oxide wafer bonding for strained silicon layer transfer applications

2007 ◽  
Vol 253 (7) ◽  
pp. 3595-3599 ◽  
Author(s):  
R. Singh ◽  
I. Radu ◽  
M. Reiche ◽  
C. Himcinschi ◽  
B. Kuck ◽  
...  
Keyword(s):  
Wafer Bonding ◽  
Silicon Layer ◽  
High Density ◽  
Strained Silicon ◽  
Layer Transfer ◽  
Thermal Oxide ◽  
Density Plasma

Silicon layer transfer by hydrogen implantation combined with wafer bonding in ultrahigh vacuum

2006 ◽  
Vol 89 (19) ◽  
pp. 192109 ◽  
Author(s):  
Alin Mihai Fecioru ◽  
Stephan Senz ◽  
Roland Scholz ◽  
Ulrich Gösele
Keyword(s):  
Wafer Bonding ◽  
Ultrahigh Vacuum ◽  
Silicon Layer ◽  
Layer Transfer ◽  
Hydrogen Implantation

Silicon layer transfer using plasma hydrogenation

2005 ◽  
Vol 87 (11) ◽  
pp. 111910 ◽  
Author(s):  
Peng Chen ◽  
S. S. Lau ◽  
Paul K. Chu ◽  
K. Henttinen ◽  
T. Suni ◽  
...  
Keyword(s):  
Silicon Layer ◽  
Layer Transfer ◽  
Plasma Hydrogenation
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