In-situ monitoring of surface stoichiometry and growth kinetics study of GaN (0001) in MOVPE by spectroscopic ellipsometry

2001 ◽  
Vol 30 (11) ◽  
pp. 1402-1407 ◽  
Author(s):  
Yoshitaka Taniyasu ◽  
Akihiko Yoshikawa
Keyword(s):  
Growth Kinetics ◽  
Spectroscopic Ellipsometry ◽  
In Situ Monitoring ◽  
Kinetics Study

Nanostructure Growth Supported by In Situ RHEED Evaluation

2017 ◽  
Vol 885 ◽  
pp. 234-238
Author(s):  
Péter Kucsera ◽  
Tamás Sándor ◽  
Gusztáv Varga Tényi ◽  
Márton Csutorás ◽  
Gergely Bátori ◽  
...  
Keyword(s):  
Growth Kinetics ◽  
In Situ Monitoring ◽  
Nanostructure Formation

The in-situ monitoring of the MBE grown nanostructures can be carried out using the RHEED method. During the droplet epitaxal growth, the observation of the nanostructure formation is very important to understand the growth kinetics. In the present work, a novel in-situ RHEED evaluation and further MBE related developments are introduced, with which the quality of the nanostructure preparation can be improved.

Atomic layer-by-layer MOCVD of high-k dielectric thin films with in-situ monitoring by spectroscopic ellipsometry

2002 ◽  
Author(s):  
Yoshishige Tsuchiya ◽  
Masato Endoh ◽  
Masatoshi Kurosawa ◽  
Raymond T. Tung ◽  
Takeo Hattori ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Layer By Layer ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

Real-Time In Situ Monitoring of GaAs (211) Oxide Desorption and CdTe Growth by Spectroscopic Ellipsometry

2012 ◽  
Vol 41 (10) ◽  
pp. 2965-2970 ◽  
Author(s):  
C.M. Lennon ◽  
L.A. Almeida ◽  
R.N. Jacobs ◽  
J.K. Markunas ◽  
P.J. Smith ◽  
...  
Keyword(s):  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
In Situ Monitoring ◽  
Cdte Growth

scholarly journals Towards Real-Time In-Situ Mid-Infrared Spectroscopic Ellipsometry in Polymer Processing

2021 ◽  
Author(s):  
Alexander Ebner ◽  
Robert Zimmerleiter ◽  
Kurt Hingerl ◽  
Markus Brandstetter
Keyword(s):  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Quantum Cascade Lasers ◽  
Polymer Processing ◽  
In Situ Monitoring ◽  
Acquisition Time ◽  
Angle Of Incidence ◽  
Mid Infrared ◽  
Ethylene Vinyl Alcohol

Recent developments in mid-infrared (MIR) spectroscopic ellipsometry enabled by quantum cascade lasers (QCLs) resulted in a drastic improvement in signal-to-noise ratio compared to conventional thermal emitter based instrumentation. Thus, it was possible to reduce the acquisition time for high-resolution broadband ellipsometric spectra from multiple hours to less than 1 second. This opens up new possibilities for real-time in-situ ellipsometry in polymer processing. To highlight these evolving capabilities we demonstrate the benefits of a QCL based MIR ellipsometer by investigating single and multilayered polymer films. The molecular structure and reorientation of a 2.5m thin biaxially oriented polyethylene terephtalate film is monitored during a stretching process lasting 24.5 s to illustrate the perspective of ellipsometric measurements in dynamic processes. In addition, a polyethylene/ethylene vinyl alcohol/polyethylene multilayer film is investigated at continuously varying angle of incidence ( 0∘ – 50∘) in 17.2 s, highlighting an unprecedented sample throughput for the technique of varying angle spectroscopic ellipsometry in the MIR spectral range. The obtained results underline the superior spectral and temporal resolution of QCL ellipsometry and qualify this technique as suitable method for advanced in-situ monitoring in polymer processing.

In situ monitoring of GaN metal-organic vapor phase epitaxy by spectroscopic ellipsometry

2000 ◽  
Vol 88 (7) ◽  
pp. 4085 ◽  
Author(s):  
S. Peters ◽  
T. Schmidtling ◽  
T. Trepk ◽  
U. W. Pohl ◽  
J.-T. Zettler ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Spectroscopic Ellipsometry ◽  
Vapor Phase Epitaxy ◽  
In Situ Monitoring ◽  
Organic Vapor ◽  
Metal Organic
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