Optical properties of ZnO thin films deposited by dc reactive magnetron sputtering

Vacuum ◽

10.1016/0042-207x(93)90357-g ◽

1993 ◽

Vol 44 (2) ◽

pp. 105-109 ◽

Author(s):

Li-jian Meng ◽

M Andritschky ◽

MP dos Santos

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Zno Thin Films ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Structure and optical properties of Cd-substituted ZnO (Zn1−x Cd x O) thin films synthesized by the dc reactive magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8451-y ◽

2014 ◽

Vol 117 (2) ◽

pp. 895-900 ◽

Author(s):

Jinghai Yang ◽

Yonggao Yue ◽

Yingrui Sui ◽

Yan Cao ◽

Maobin Wei ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Influence of deposition conditions on optical properties of aluminum nitride (AlN) thin films prepared by DC-reactive magnetron sputtering

Materials Letters ◽

10.1016/s0167-577x(02)01106-0 ◽

2003 ◽

Vol 57 (13-14) ◽

pp. 1925-1933 ◽

Author(s):

Arshad Mahmood ◽

Nikifor Rakov ◽

Mufei Xiao

Keyword(s):

Optical Properties ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Deposition Conditions

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Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulsed-DC reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.08.044 ◽

2008 ◽

Vol 202 (11) ◽

pp. 2354-2357 ◽

Author(s):

M. Rubio-Roy ◽

E. Pascual ◽

M.C. Polo ◽

J.L. Andújar ◽

E. Bertran

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Structural And Optical Properties ◽

Pulsed Dc ◽

Dc Reactive Magnetron Sputtering

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Effects of oxygen partial pressure on resistive switching characteristics of ZnO thin films by DC reactive magnetron sputtering

Solid State Communications ◽

10.1016/j.ssc.2010.07.032 ◽

2010 ◽

Vol 150 (39-40) ◽

pp. 1919-1922 ◽

Author(s):

Zhenguo Ji ◽

Qinan Mao ◽

Weiqing Ke

Keyword(s):

Magnetron Sputtering ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Resistive Switching ◽

Reactive Magnetron Sputtering ◽

Zno Thin Films ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Switching Characteristics

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Optical properties of CdIn2O4 thin films prepared by DC reactive magnetron sputtering

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2006.10.103 ◽

2006 ◽

Vol 297 (2) ◽

pp. 411-418 ◽

Author(s):

F.F. Yang ◽

L. Fang ◽

S.F. Zhang ◽

K.J. Liao ◽

G.B. Liu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Convertibility of conduction type in Al-N co-doped ZnO thin films based on DC reactive magnetron sputtering

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. ◽

10.1109/icsict.2004.1435325 ◽

2005 ◽

Author(s):

Guodong Yuan ◽

Zhizhen Ye ◽

L. Zliu ◽

Qing Qian ◽

Binghui Zhao

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Zno Thin Films ◽

Reactive Magnetron ◽

Conduction Type ◽

Dc Reactive Magnetron Sputtering ◽

Doped Zno ◽

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Erratum to “Transparent conductive Al and Mn doped ZnO thin films prepared by dc reactive magnetron sputtering” [Surf. Coat. Technol. 184 (2004) 84–92]

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2004.06.031 ◽

2004 ◽

Vol 187 (2-3) ◽

pp. 410 ◽

Author(s):

H.T. Cao ◽

Z.L. Pei ◽

J. Gong ◽

C. Sun ◽

R.F. Huang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Zno Thin Films ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Doped Zno ◽

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Fabrication of p-Type ZnO Thin Films via DC Reactive Magnetron Sputtering by Using Na as the Dopant Source

Journal of Electronic Materials ◽

10.1007/s11664-006-0047-7 ◽

2007 ◽

Vol 36 (4) ◽

pp. 498-501 ◽

Author(s):

L. L. Yang ◽

Z. Z. Ye ◽

L. P. Zhu ◽

Y. J. Zeng ◽

Y. F. Lu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Zno Thin Films ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

P Type ◽

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Electrical and optical properties of molybdenum-doped ZnO transparent conductive thin films prepared by dc reactive magnetron sputtering

Semiconductor Science and Technology ◽

10.1088/0268-1242/24/12/125012 ◽

2009 ◽

Vol 24 (12) ◽

pp. 125012 ◽

Author(s):

Chenguo Wu ◽

Jie Shen ◽

Jin Ma ◽

Sanpo Wang ◽

Zhuangjian Zhang ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Dc Reactive Magnetron Sputtering ◽

Doped Zno ◽

Conductive Thin Films

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Fabrication and characteristics of the low-resistive p-type ZnO thin films by DC reactive magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2005.10.057 ◽

2006 ◽

Vol 60 (7) ◽

pp. 912-914 ◽

Author(s):

Chao Wang ◽

Zhenguo Ji ◽

Junhua Xi ◽

Juan Du ◽

Zhizhen Ye

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Zno Thin Films ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

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