Effect of KrF Laser Irradiation on the Morphology and Microstructure of Amorphous PZT Thin Films Grown by RF Magnetron Sputtering

2021 ◽  
Author(s):  
Mohammed Mahdi ◽  
Mohamed Kadri
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Laser Irradiation ◽  
Rf Magnetron Sputtering ◽  
Pzt Thin Films ◽  
Krf Laser

Effects of adhesion layer (Ti or Zr) and Pt deposition temperature on the properties of PZT thin films deposited by RF magnetron sputtering

2005 ◽  
Vol 243 (1-4) ◽  
pp. 113-124 ◽  
Author(s):  
C.C. Mardare ◽  
E. Joanni ◽  
A.I. Mardare ◽  
J.R.A. Fernandes ◽  
C.P.M. de Sá ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Deposition Temperature ◽  
Rf Magnetron Sputtering ◽  
Adhesion Layer ◽  
Pzt Thin Films

scholarly journals Fabrication of Smart Material PZT thin Films by RF Magnetron Sputtering, Method in Micro Actuators

2005 ◽  
Vol 71 (701) ◽  
pp. 66-72 ◽  
Author(s):  
Kazuyoshi TSUCHIYA ◽  
Toshiaki KITAGAWA ◽  
Yasutomo UETSUJI ◽  
Eiji NAKAMACHI
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Smart Material ◽  
Pzt Thin Films ◽  
Micro Actuators

FABRICATION OF PZT THIN FILMS WITH TiOx BUFFER LAYERS BY RF MAGNETRON SPUTTERING

2006 ◽  
Vol 80 (1) ◽  
pp. 281-288 ◽  
Author(s):  
CHAOWEI ZHONG ◽  
JIAGEN PENG ◽  
SHUREN ZHANG ◽  
WANGLI ZHANG
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Buffer Layers ◽  
Pzt Thin Films

Electrical Conduction Mechanisms in PZT Thin Films Deposited by RF Magnetron Sputtering Method

2013 ◽  
Vol 442 (1) ◽  
pp. 101-106 ◽  
Author(s):  
M. V. Kamenshchikov ◽  
A. V. Solnyshkin ◽  
A. A. Bogomolov ◽  
I. P. Pronin
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Electrical Conduction ◽  
Rf Magnetron Sputtering ◽  
Pzt Thin Films ◽  
Conduction Mechanisms ◽  
Electrical Conduction Mechanisms
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