Effect of single-pulse laser irradiation energy on healing fatigue damage for copper film

2014 ◽  
Vol 28 (4) ◽  
pp. 1257-1264 ◽  
Author(s):  
Chong-Gang Ren ◽  
De-Guang Shang ◽  
Lu Wang ◽  
Yu-Bo Guo
1986 ◽  
Vol 71 ◽  
Author(s):  
J. Zahavi ◽  
S. Tamir ◽  
M. Halliwell

AbstractHighly selective metal and alloy deposition with simultaneous silicide formation - on semiconductor substrates immersed in commercial electroplating solutions has been investigated via pulse laser irradiation without masking procedures and external electric current.Specimens of 5i and GaAs substrates, immersed in gold and in palladiumnickel electroplating solutions, were irradiated by a Qswitch YAG pulse laser perpendicular to their surfaces at predesired local zones. The gold, palladium and nickel deposits thus obtained were subsequently examined and characterised by SEM, TEM, AES, ESCA and RBS.Deposit thickness ranged from a few hundred angstroms to several micrometers, depending primarily on the laser irradiation energy. The elemental Gold deposit exhibited Schottky barrier contacts with the GaAs and Si substrates. Palladium and nickel silicides obtained on n-type silicon substrates likewise exhibited Schottky behavior contracts.


2011 ◽  
Vol 1365 ◽  
Author(s):  
Chandra Prakash R. Gaddam ◽  
Joseph P. Moening ◽  
Nanke Jiang ◽  
Daniel G. Georgiev

ABSTRACTWe present data on micrometer-scale localized single-pulse laser irradiation of Au, Cu, Al, or Ti films on borosilicate glass substrates. These metals represent a range of thermal properties, chemical reactivity levels, and relevance to specific applications. A mask projection technique employing a Q-switched Nd:YAG laser, emitting at its fourth harmonic of 266nm, was used to produce the irradiation spots in this work. The metal films, deposited by RF-sputtering, had thicknesses of several hundred nanometers. Sample irradiation was performed in either vacuum or ambient air, and the resulting microstructures were examined by electron microscopy. The results indicate that irradiation of Cu films can lead to the formation of bumps, sharp cones or protrusions. However, the controllability of these structures on Cu films is limited, compared to those formed on Au or Si. The results, upon irradiation of Ti films, are limited to melting and surface roughening or ablation openings, regardless of the conditions of irradiation, film thickness, substrate or ambient gas. The modifications that occur within Al films are reproducible, but limited in shape and size.


2015 ◽  
Author(s):  
Ji-xing Cai ◽  
Xu Qu ◽  
He Li ◽  
Guang-yong Jin

Carbon ◽  
2011 ◽  
Vol 49 (3) ◽  
pp. 1018-1024 ◽  
Author(s):  
M. Shakerzadeh ◽  
N. Xu ◽  
M. Bosman ◽  
B.K. Tay ◽  
X. Wang ◽  
...  

AIAA Journal ◽  
1980 ◽  
Vol 18 (7) ◽  
pp. 857-859 ◽  
Author(s):  
Peter K. Wu ◽  
Robert G. Root

Proceedings ◽  
2018 ◽  
Vol 2 (8) ◽  
pp. 478 ◽  
Author(s):  
Masayuki Arai ◽  
Kenji Inada ◽  
Tomoki Morinaga ◽  
Kiyohiro Itoh ◽  
Hiroki Yokota ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document