Experimental Investigation for Generation of Micro-Holes on Silicon Wafer Using Electrochemical Discharge Machining Process

Electrochemical discharge machining has been proved to be efficient micro-machining process and significantly used for the machining of non-conductive materials. The miniaturized products have gained advantages in Lab-on-a-chip devices and microelectromechanical system because of advancement in technology. The challenge to produce micro features has been suitably addressed by electrochemical discharge machining and emerged as potential contender in generating micro holes and micro channels on electrically non-conductive materials. This article includes state-of-art review on different domains of electrochemical discharge machining, which includes work piece, electrolyte, behaviour of tool electrode, gas film formation, machining quality along with recent hybridizations in electrochemical discharge machining process. The conclusion focuses or summarizes the future research trends for enhancement of electrochemical discharge machining efficiency and tackles problems encountered in machining.

Download Full-text

Modeling and experimental investigation of gas film in micro-electrochemical discharge machining process

International Journal of Machine Tools and Manufacture ◽

10.1016/j.ijmachtools.2014.11.006 ◽

2015 ◽

Vol 90 ◽

pp. 8-15 ◽

Cited By ~ 31

Author(s):

Baoyang Jiang ◽

Shuhuai Lan ◽

Kevin Wilt ◽

Jun Ni

Keyword(s):

Experimental Investigation ◽

Machining Process ◽

Electrochemical Discharge Machining ◽

Electrochemical Discharge

Download Full-text

Experimental Investigation and Analysis on Borosilicate Glass Using Electrochemical Discharge Machining Process

Silicon ◽

10.1007/s12633-021-00980-1 ◽

2021 ◽

Author(s):

Abhishek Charak ◽

C.S Jawalkar

Keyword(s):

Experimental Investigation ◽

Borosilicate Glass ◽

Machining Process ◽

Electrochemical Discharge Machining ◽

Electrochemical Discharge

Download Full-text

Experimental Study of Micro Electrochemical Discharge Machining of Ultra-Clear Glass with a Rotating Helical Tool

Processes ◽

10.3390/pr7040195 ◽

2019 ◽

Vol 7 (4) ◽

pp. 195 ◽

Cited By ~ 6

Author(s):

Yong Liu ◽

Chao Zhang ◽

Songsong Li ◽

Chunsheng Guo ◽

Zhiyuan Wei

Keyword(s):

Three Dimensional ◽

Pulse Frequency ◽

Machining Process ◽

Machining Parameters ◽

Electrochemical Discharge Machining ◽

Electrochemical Discharge ◽

Micro Channels ◽

Clear Glass ◽

Micro Holes ◽

Side Gap

Electrochemical discharge machining (ECDM) is one effective way to fabricate non-conductive materials, such as quartz glass and ceramics. In this paper, the mathematical model for the machining process of ECDM was established. Then, sets of experiments were carried out to investigate the machining localization of ECDM with a rotating helical tool on ultra-clear glass. This paper discusses the effects of machining parameters including pulse voltage, duty factor, pulse frequency and feed rate on the side gap under different machining methods including electrochemical discharge drilling, electrochemical discharge milling and wire ECDM with a rotary helical tool. Finally, using the optimized parameters, ECDM with a rotary helical tool was a prospective method for machining micro holes, micro channels, micro slits, three-dimensional structures and complex closed structures with above ten micrometers side gaps on ultra-clear glass.

Download Full-text