Free-Standing Porous Silicon Film Produced by a Pulsed Anodic Etching of n+-Silicon Substrate in an HF: HCl: C2H5 OH: H2O2:H2O Electrolyte: Characterization and Adsorption of Colchicine

Silicon ◽  
2020 ◽  
Author(s):  
M. Naddaf ◽  
R. A. Jarjour
Keyword(s):  
Porous Silicon ◽  
Silicon Substrate ◽  
Silicon Film ◽  
Free Standing ◽  
Anodic Etching

Fabrication of Macroporous on No-Mask Silicon Substrate for Application to Microsystems

2008 ◽  
Author(s):  
Gyoko Nagayama ◽  
Ryuji Ando ◽  
Kei Muramatsu ◽  
Takaharu Tsuruta
Keyword(s):  
Fuel Cell ◽  
Porous Silicon ◽  
Pore Size ◽  
Silicon Wafer ◽  
Silicon Substrate ◽  
Electrochemical Etching ◽  
Cell System ◽  
Back Side ◽  
Ambient Conditions ◽  
Anodic Etching

We applied the anodic etching (i. e. photo assisted electrochemical etching) to the n type silicon substrate of orientation (100) without masking to fabricate macropores penetrated Si substrate. The anodic etching conditions of the macroporous formation were discussed and the effects of the resistivity, voltage, current density, electrolyte concentration and illumination etc. on the pore size and the porosity were investigated. The pores in high aspect ratio through the cross section of the silicon wafer were obtained with polishing and RIE (reactive ion etching) from the back side. It is found that the pore size at the back side is about 1.5 to 2 times larger than that of the front side. Also, as one example of the applications of porous silicon to microsystems, we demonstrate the results obtained in a micro fuel cell system using a porous silicon membrane (PSM). The PSM was fabricated by a porous silicon wafer which was filled with Nafion dispersion solution with ultrasonic vibrations. It was used as a proton conduction membrane by assembling into the H2 / air feed fuel cell at ambient conditions using conventional electrodes. We found that the Nafion filled PSM worked well and a maximum power density of 89.2 mW/cm2 were achieved under the flow rate of 100ml/min for H2 and 200ml/min for air.

Photonic Polymer Replicas from Distributed Bragg Reflectors Structured Porous Silicon

2007 ◽  
Vol 7 (11) ◽  
pp. 4165-4168
Author(s):  
Jihoon Kim ◽  
Youngdae Koh ◽  
Seunghyun Jang ◽  
Young Chun Ko ◽  
Hee-Gweon Woo ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Silicon Film ◽  
Composite Films ◽  
Nanometer Scale ◽  
Crystal Layer ◽  
Bragg Reflectors ◽  
Distributed Bragg Reflectors ◽  
Free Standing ◽  
Reflectivity Spectrum ◽  
Silicon Photonic

Well defined 1-dimentional (1-D) photonic crystals of polymer replicas have been successfully obtained. DBR porous silicon containing nanometer-scale pores are prepared by an anodic electrochemical etch of p++-type silicon wafer. The resulting DBR porous silicon film removed from the substrate by applying an electropolishing current has been thermally oxidized in the furnace at 400 °C for 3 h. Oxidized DBR PSi/polystyrene composite films are prepared by casting of polymer solution onto a free-standing porous silicon photonic crystal layer. Flexible photonic polymer replicas have been prepared after the removal of oxidized DBR PSi matrix in HF/H2O mixture solution. Polymer replicas exhibit a sharp resonance in the reflectivity spectrum. Optical characteristics of photonic polymer replica indicate that the surface of polymer film has a negative structure of DBR PSi. This replica is stable in aqueous solutions for several days without any degradation.

Photoluminescent coupled multiple microcavity structures made of porous silicon

2004 ◽  
Vol 832 ◽  
Author(s):  
V. Agarwal ◽  
J.A. Soto Urueta ◽  
J. Miguel Gracia
Keyword(s):  
Porous Silicon ◽  
Structure Formation ◽  
Layered Structure ◽  
Silicon Substrate ◽  
Photonic Bandgap ◽  
Experimental Characterization ◽  
Free Standing ◽  
Photonic Bandgap Structures ◽  
Silicon Lasers

ABSTRACTIn this paper we report the fabrication and experimental characterization of photoluminescent coupled multiple microcavity 1-Dimensional photonic bandgap structures for specific photonic applications. These structures have been prepared on silicon substrate as well as free standing. The comparision with theory gave a good fit showing desired structure formation for more than 184 layered structure. These structures can be useful for a large variety of applications such as silicon lasers.

Photonic Polymer Replicas from Distributed Bragg Reflectors Structured Porous Silicon

2007 ◽  
Vol 7 (11) ◽  
pp. 4165-4168 ◽  
Author(s):  
Jihoon Kim ◽  
Youngdae Koh ◽  
Seunghyun Jang ◽  
Young Chun Ko ◽  
Hee-Gweon Woo ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Silicon Film ◽  
Composite Films ◽  
Nanometer Scale ◽  
Crystal Layer ◽  
Bragg Reflectors ◽  
Distributed Bragg Reflectors ◽  
Free Standing ◽  
Reflectivity Spectrum ◽  
Silicon Photonic

Well defined 1-dimentional (1-D) photonic crystals of polymer replicas have been successfully obtained. DBR porous silicon containing nanometer-scale pores are prepared by an anodic electrochemical etch of p++-type silicon wafer. The resulting DBR porous silicon film removed from the substrate by applying an electropolishing current has been thermally oxidized in the furnace at 400 °C for 3 h. Oxidized DBR PSi/polystyrene composite films are prepared by casting of polymer solution onto a free-standing porous silicon photonic crystal layer. Flexible photonic polymer replicas have been prepared after the removal of oxidized DBR PSi matrix in HF/H2O mixture solution. Polymer replicas exhibit a sharp resonance in the reflectivity spectrum. Optical characteristics of photonic polymer replica indicate that the surface of polymer film has a negative structure of DBR PSi. This replica is stable in aqueous solutions for several days without any degradation.

FILTERS, MIRRORS AND MICROCAVITIES FROM POROUS SILICON

2006 ◽  
Vol 20 (01) ◽  
pp. 99-110 ◽  
Author(s):  
V. AGARWAL ◽  
J. A. DEL RÍO
Keyword(s):  
Porous Silicon ◽  
Silicon Substrate ◽  
Photonic Bandgap ◽  
Experimental Characterization ◽  
Free Standing ◽  
High Quality ◽  
One Dimensional ◽  
Dielectric Mirrors ◽  
Photonic Bandgap Structures

In this paper we report the detailed fabrication and experimental characterization of porous silicon one-dimensional photonic bandgap structures for specific photonic applications. These structures have been prepared on silicon substrate as well as free standing and can be proven useful for a large variety of applications such as high quality dielectric mirrors and filters.

Tunable NIR filter based on a free-standing porous silicon film containing nematic liquid crystal

2009 ◽  
Vol 11 (10) ◽  
pp. 105106 ◽  
Author(s):  
Georgiy V Tkachenko ◽  
Volodymyr Tkachenko ◽  
Luca De Stefano ◽  
Igor A Sukhoivanov
Keyword(s):  
Liquid Crystal ◽  
Porous Silicon ◽  
Nematic Liquid Crystal ◽  
Silicon Film ◽  
Free Standing
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