2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
Latest Publications


TOTAL DOCUMENTS

142
(FIVE YEARS 0)

H-INDEX

2
(FIVE YEARS 0)

Published By ASMEDC

0791842940

Author(s):  
Gang Zhao ◽  
Qiong Shu ◽  
Yue Li ◽  
Jing Chen

A novel technology is developed to fabricate high aspect ratio bulk titanium micro-parts by inductively coupled plasma (ICP) etching. An optimized etching rate of 0.9 μm/min has been achieved with an aspect ratio higher than 10:1. For the first time, SU-8 is used as titanium etching mask instead of the traditional hard mask such as TiO2 or SiO2. With an effective selectivity of 3 and a spun-on thickness beyond 100 μm, vertical etching sidewall and low sidewall roughness are obtained. Ultra-deep titanium etching up to 200 μm has been realized, which is among the best of the present reports. Titanium micro-springs and planks are successfully fabricated with this approach.


Author(s):  
Fangrong Hu ◽  
Jun Yao ◽  
Chuankai Qiu ◽  
Dajia Wang

In this paper, a MEMS mirror actuated by an electrostatic repulsive force has been proposed and analyzed. The mirror consists of four U-shape springs, a fixed bottom electrode and a movable top electrode, there are many comb fingers on the edges of both electrodes. When the voltage is applied to the top and bottom electrodes, an asymmetric electric field is generated to the top movable fingers and springs, thus a net electrostatic force is produced to move the top plate out of plane. This designed micro-mirror is different from conventional MDM based on electrostatic-attractive-force, which is restricted by one-third thickness of the sacrificial layer for the pull-in phenomenon. The characteristic of this MDM has been analyzed, the result shows that the resonant frequency of the first mode is 8 kHz, and the stroke reaches 10μm at 200V, a MDM with large strokes can be realized for the application of adaptive optics in optical aberrations correction.


Author(s):  
Xu-Dong Peng ◽  
Li-Li Tan ◽  
Ji-Yun Li ◽  
Song-En Sheng ◽  
Shao-Xian Bai

A two-dimensional Reynolds equation was established for isothermal compressible gas between the two faces of a dry gas face seal with both spiral grooves and an inner annular groove onto the hard face. The opening force, the leakage rate, the axial film stiffness and the film stiffness to leakage ratio were calculated by finite element method. The comparisons with the sealing performances of a typical gas face seal only with spiral grooves onto its hard face were made. The effects of the face geometric parameters on the static behavior of such a seal were analyzed. The optimization principle for geometric parameters of a dry gas face seals with spiral grooves and an inner annular groove was presented. The recommended geometric parameters of spiral grooves and circular groove presented by optimization can ensure larger axial stiffness while lower leakage rates.


Author(s):  
Yanping Bai ◽  
Ping An ◽  
Yilong Hao

Fabrication of a MEMS system involves design, testing, packaging and reliability related issues. However, reliability issues that are discovered at a late phase may cause major delays in the product development going together with high costs. In this paper we study the failure modes and Mechanisms of MEMS accelerometers products and present the classification modeling of failure modes based on neural networks. In ours MEMS accelerometers, there are six failure mechanisms that have been found to be the primary sources of failure nodes. We introduce nonlinear BP network with a hidden layer and linear perception to classify for MEMS accelerometers products. Classification results show that nonlinear BP network seem to be most appropriate to approach the problem of failure modes classification than linear perception. BP neural network is capable of learning the intrinsic relations of the patterns with which they were trained. For all experiments results, the training success of rate is 100% for both methods. BP networks obtained a high forecast success of rate of over 99.5%. The linear perception model obtained a success of rate of over 95.5%. We also analyze the technology stability of MEMS products.


Author(s):  
Xiuhan Li ◽  
Guanghua Shu ◽  
Jinan Sao ◽  
Xiongwei Zhang

A* high Q-factor circular-section solenoid-type inductor is designed and fabricated through micro electro mechanical system (MEMS) technology. The radius of the circular-section is 100μm. Ansoft HFSS is used to design and optimize the structure parameters of the inductor. The stable inductance of 10nH and maximum Q-factor of 46 is gained at the N of 10, wire width w of 10μm, space between wires d of 15μm and the self-resonance frequency of the inductor is above 10GHz. A novel fabrication method—flip chip bonding is proposed to bond the two parts of the inductor, and the process is compatible with CMOS process.


Author(s):  
Nam-Trung Nguyen

This paper presents our recent works on thermal control for droplet-based microfluidics. Temperature dependent properties of liquids have been use for actuation and many other applications in droplet-based microfluidics. In analogy to an analog/digital electronic circuits, a droplet-based microfluidic system consists for three main subsystems: droplet formation (analog/digital converter), droplet manipulation (digital processing) and droplet merging (digital/analog converter). This paper will present our recent achievements in thermal control of droplet formation in different configurations such as T-junction and cross junction with integrated microheaters. Furthermore, results on droplet switching will be presented. The droplet switch represent basic logic gate that can be used to construct a more complex droplet-based digital network. Thermocapillary actuation of microdroplets in one-dimensional and two-dimensional microfluidic platforms will be presented. Both numerical and experimental results will be presented in this paper.


Author(s):  
Paul Li ◽  
Derek Chew

A microfluidic biochip has been fabricated to retain a single cell (e.g. a cancerous cell) within a U-shaped cell retention structure for real-time monitoring of cellular changes over long periods of time (hours). Experiments illustrate the cell heterogeneity in drug responses, and demonstrate the significance of the microchip platform for cancer diagnosis. This microdevice provides a clinical diagnostic platform to evaluate multi-drug-resistance in cancer patients. This device may increase the effectiveness of current chemotherapeutic strategies by evaluating an individual’s cellular response to these agents.


Author(s):  
Meng-Ju Lin

Photonic crystal is widely used in optical communication. Waveguide is one of important components used in optical communication. The performance of right-angular, cross, and Y shapes photonic crystal waveguide used in optical communication is investigated. Material used for photonic crystal is GaAs. Shape of photonic crystal rod is cylindrical rod. These rods are arranged to become matrix with constant distance. In the photonic crystal matrix, some rods are removed to form waveguide channel. Three shapes of waveguides are discussed. They are right-angular, cross, and Y shapes. The relationship between distances of circular photonic crystals and wavelength in propagation is discussed. Due to coupling of multi physical phenomena and complex geometry, a finite element method software called COMOSL is used to analyze performance of waveguide under different wavelength of light. It is found under different distance of photonic crystal rods array and wavelength, light could propagate along waveguide successfully or lost energy and decay. From results analyzed by COSMOL software, numerical data are obtained to classify light being able to pass waveguide successfully or not. By neural network method, equations between crystal rods array distance and wavelength to decide whether light can propagate through waveguide successfully or not are derived. They can be used to determine performance of light propagating in waveguide. For Y shape waveguide, bifurcation phenomena of light propagate in different channel of Y shape branch is found. It is found under different crystal pillar distance the light of different wavelength would propagate in one of the branch of the Y shape channel. The longer wavelength lights pass the upper channel and the shorter pass the lower. The results show that the bifurcation happens at the tendency if pillar distance increases the bifurcation wavelength also increases. From neural network method, equations to decide light propagate to upper or lower branch of Y shape waveguides are also obtained.


Author(s):  
Junjie Ou ◽  
Shuwen Wang ◽  
Carolyn L. Ren ◽  
Janusz Pawliszyn

A poly(dimethylsiloxane) (PDMS) microfluidic chip-based cartridge was fabricated by sandwiching commercial dialysis membrane and inserting fused-silica capillary into the end of channel according to the principle and structure of a commercial fused-silicon capillary-based cartridge, which can adapt to an IEF analyzer for isoelectric focusing with whole channel imaging detection (IEF-WCID). The novel design of sandwiching membrane in this chip not only eliminated the unfavorable hydrodynamic pressure, leading to poor IEF reproducibility, but made the sample injection much easy. Thus the reproducibility of analysis was very good. The prepared microfluidic chips were applied for qualitative and quantitative analysis of proteins. The six pI markers in the range of 3–10 were separated by IEF under the optimized conditions. The pH gradients exhibited good linear by plotting the pI versus peak position, and the correlation coefficient reached to 0.9994 and 0.9995. The separation of more complicated human hemoglobin control and myoglobin sample could be achieved. By comparison with the separation efficiency obtained on the microfluidic chip and commercial cartridge, the results were similar, which indicates the capillary cartridge may be replaced with the cost-efficient PDMS microfluidic chip. It is anticipated the high throughput analysis can be easily performed on this microfluidic chip patterned multi-channels. The techniques of capillary electrophoresis (CE) have been extensively explored for the chip-based separation. Isoelectric focusing (IEF) as one of high-resolution CE techniques has been widely applied for the separation of zwitterionic biomolecules, such as proteins and peptides. After the samples were focused at their corresponding pIs, the focused zones were mobilized to pass through the detection point for obtaining an electropherogram. This single-point detection imposes extensive restriction for chip-based IEF because a mobilization process requires additional time and lowers resolution and reproducibility of the separation [1]. An alternative is whole-column imaging detection developed by Pawliszyn et al [2] is an ideal detection method for IEF because no mobilization is required, which avoids the disadvantages as mentioned previously. Most microfluidic systems could be fabricated in glass/silicon or polymers in which the channels are defined using photolithography and micromachining. Mao and Pawliszyn [3] have developed a method for IEF on an etched quartz chip following whole-channel imaging detection (WCID). Ren et al [4] presented an integrated WCID system on glass microfluidic chip. However, these materials have some disadvantages such as expensive and fragile and so on. An attractive alternative for fabrication of microfluidic devices is using poly(dimethylsiloxane) (PDMS) as material, which has unique properties such as nontoxic, optical transparent down to 280 nm, elastomeric, hydrophobic surface chemistry Yao et al. [5] designed the glass/PDMS microchip integrated whole-column fluorescence imaging detection for IEF of R-phycoerythrin. Our preliminary studies have successfully developed a PDMS chip-based cartridge for IEF-WCID. It is due to hydrodynamic flow between two reservoirs that the focused zones were mobilized, thus gave poor reproducibility and difficulty in sample infusion. As membranes have been integrated into microchips for microdialysis, protein digestion, solid-phase extraction, desalting, pumping and so on, it could minimize hydrodynamic flow by using membranes as a filter. Although a simple PDMS chip-based cartridge has been successfully fabricated in our labs according to the principle of commercial capillary-based cartridge, it is difficult to introduce the sample into channel for IEF-WCID. As the vacuum was applied in one end of channel for infusing of solution into channel, the lifetime of this chip-based cartridge is shortened. Additionally, the hydrodynamic flow is occurred due to the different heights of anolyte and catholyte in two reservoirs, respectively. The IEF separation was deteriorated by the infusion of anolyte or catholyte, thus leading to poor reproducibility of IEF-WCID analysis. Similar to the hollow fiber in the commercial capillary-based cartridge in which it is aimed to separate the sample in the capillary and electrolytes in the reservoirs, porous membrane was integrated into PDMS chips for decrease of hydrodynamic flow [6]. As a result, integration of dialysis membrane is considered into the design of our new chip-based cartridge. Up to now, many approaches have been described to integrate membranes into glass/quartz or polymeric microfluidic chips. A simple method is direct incorporation by gluing or clamping commercial flat membranes. A major problem of this method is sealing, otherwise, a phenomenon of leakage around the membranes is always occurred due to the capillary force. A novel approach of sandwiching dialysis membrane was developed as schematically indicated in Figure 1. After optimizing IEF conditions, the separation of pI markers was performed on the obtained PDMS microfluidic chip. As exhibited in Figure 2a, six pI markers could be well separated on the PDMS chips patterned the channel of 100 μm deep, 100 μm wide by IEF-WCID. All the peaks were sharp and symmetric, indicating that both EOF and analytes adsorption were completely suppressed by the dynamic coating of PVP. The plots of peak position versus pI of these pI markers suggested good linearity of pH gradient (as shown in Figure 2b). The linear correlation coefficient was 0.9995 (n = 6). As expected to the capillary-based cartridge, the PDMS microfluidic chips could be applied for qualitative and quantitative analysis of proteins. Figure 3a exhibited that human hemoglobin control AFSC contains four known isoforms (HbA, HbF, HbS and HbC) mixed with two pI marker 6.14 and 8.18 were well separated on the PDMS chip by IEF-WCID, indicating the strong separation ability of chip similar to the commercial capillary-based cartridge. According to the linearity of pH gradient, these four isoforms with the pIs of 7.0, 7.1, 7.3 and 7.5, respectively, could be detected. An unknown isoform in human hemoglobin control marked asterisk in Figure 3A observed besides the definite four isoforms A, F, S and C. The myoglobin from horse heart contains two isoforms, whose pIs are 6.8 and 7.2, respectively. It can be seen from Figure 3b that these two isoforms were separated on PDMS chip by IEF-WCID. The peak 1 and 2 could be assigned to the two isoforms according to their pI. The pI of unknown peak marked asterisk could be measured to 6.25.


Author(s):  
Hairong Wang ◽  
Xianni Gao ◽  
Guoliang Sun ◽  
Yulong Zhao ◽  
Zhuangde Jiang

In order to detect methane (CH4) accurately and reliably, this paper presents a sensor which consists of infrared diode, fixtures, blazed grating, to realize the extremely narrow-bandwidth light at wavelength of 1.331μm. Based on factors such as compatibility with the transmission characteristics of silica fiber and the cost, a LED (light-emitting diode) with center wavelength of 1.3μm is selected. The LED light is modulated as the parallel light beam. As the light is incident in a micro-blazed grating with certain angle, by diffraction and interference, the light will output the maximum light intensity of its diffraction order at 1.331 μm, which just is an absorption peak of CH4. Micro-blazed grating applied here is low cost and easy replication by various ways, which makes extreme narrow width wavelength possible. Simulation and analysis indicate the designed prototype can output 1.331μm with bandwidth from 1.32907μm to 1.332495μm. With the light source basing on light dividing system, more reliable and higher sensitive measurement of the dangerous gases such as methane and carbon monoxide (CO) can be realized.


Sign in / Sign up

Export Citation Format

Share Document