Analysis of Mechanical and Tribological Properties of Silicon Incorporated Diamond like Carbon Nanocomposite Coating

Silicon ◽  
2021 ◽  
Author(s):  
V. Sakthi Murugan ◽  
S. Madhu
2021 ◽  
Author(s):  
V. Sakthi Murugan ◽  
S. Madhu

Abstract The Silicon (Si) contained diamond like carbon (DLC) nanocomposite were prepared by using thermal chemical vapour deposition (CVD) technique by varying the acetylene (C2H2) flowrates. The scanning electron microscope (SEM) results showed a smoother surface of nanocomposite at low C2H2 flowrates. The atomic force microscope (AFM) reveals the increase of particle size and surface roughness of the composite with respect to the C2H2 flowrates. The mechanical properties were evaluated using the nanoindentation and it is observed that the hardness (H) and young’s modulus (E) of the nanocomposite increases with increase of the C2H2 flow rate. The internal stress (𝝈) was computed by using Stoney’s equation and it is noticed that due to the incorporation of Si the residual stress significantly decreased. The tribological properties of the nanocomposite were analysed by computing the H/E, H3/E2, plasticity index (PI) and elasticity index (EI). The results showed that the Si incorporated nanocomposite (Si-DLC) has an excellent tribological properties.


2012 ◽  
Vol 706-709 ◽  
pp. 2596-2601
Author(s):  
E. Vogli ◽  
Fabian Hoffmann ◽  
E. Bartis ◽  
G. S. Oehrlein ◽  
Wolfgang Tillmann

It has been established that hardness and density of diamond-like carbon (DLC) layers can be raised by increasing ion energy during deposition, decreasing H-content and by increasing sp3-fraction. To confirm differences in hydrogen content of hydrogen containing and hydrogen free DLC films deposited at different bias voltages, layers were etched in oxygen atmosphere in a capacitively coupled plasma device. By employing real-time ellipsometry measurements, the H-content of the hydrogen containing a-C:H layers were estimated by determining the optical constants n and k (n-real part and k-imaginary part of the refractive index). In addition, DLC layers were analyzed by X-ray photoelectron spectroscopy to estimate the ratio of sp²- and sp³-hybridization. The mechanical and tribological properties of the coatings were evaluated by means of nanoindentation and ball-on-disc-tests. Finally correlations between these properties, H-content and sp3/sp2-ratio were obtained in an effort to explain different tribological behaviors of DLC-layers.


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