Phenomenology-based model predictive control of electron density in Ar/SF6 capacitively coupled etch plasma

2022 ◽  
Author(s):  
Sangwon Ryu ◽  
Ji-Won Kwon ◽  
Ingyu Lee ◽  
Jihoon Park ◽  
Gon-Ho Kim
Keyword(s):  
Model Predictive Control ◽  
Electron Density ◽  
Predictive Control ◽  
Capacitively Coupled

Wide-area Power System Oscillation Damping using Model Predictive Control Technique

2011 ◽  
Vol 131 (7) ◽  
pp. 536-541 ◽  
Author(s):  
Tarek Hassan Mohamed ◽  
Abdel-Moamen Mohammed Abdel-Rahim ◽  
Ahmed Abd-Eltawwab Hassan ◽  
Takashi Hiyama
Keyword(s):  
Model Predictive Control ◽  
Power System ◽  
Predictive Control ◽  
Wide Area ◽  
Control Technique ◽  
Oscillation Damping
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