Kinetics of polyimide etching by supersonic beams consisting of atomic and molecular oxygen mixtures
1993 ◽
Vol 212
(1-2)
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pp. 43-49
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Keyword(s):
1985 ◽
Vol 40
(8)
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pp. 1527-1531
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1973 ◽
Vol 77
(14)
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pp. 1810-1813
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2000 ◽
pp. 1575-1582
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Keyword(s):
2020 ◽
Vol 43
(3)
◽
pp. 465-475
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