Kinetics of polyimide etching by supersonic beams consisting of atomic and molecular oxygen mixtures

1993 ◽  
Vol 212 (1-2) ◽  
pp. 43-49 ◽  
Author(s):  
A.P. Nikiforov ◽  
V.E. Skurat
Author(s):  
Domenik Schleier ◽  
Engelbert Reusch ◽  
Marius Gerlach ◽  
Tobias Preitschopf ◽  
Deb Pratim Mukhopadhyay ◽  
...  

The reaction kinetics of the isomers of the methylallyl radical with molecular oxygen has been studied in a flow tube reactor at the vacuum ultraviolet (VUV) beamline of the Swiss Light Source storage ring.


2020 ◽  
Vol 43 (3) ◽  
pp. 465-475 ◽  
Author(s):  
Johannes Claußnitzer ◽  
Benjamin Bertleff ◽  
Wolfgang Korth ◽  
Jakob Albert ◽  
Peter Wasserscheid ◽  
...  

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