Homogeneous increase in oxygen concentration in Czochralski silicon crystals by a cusp magnetic field

Journal of Crystal Growth ◽

10.1016/0022-0248(89)90317-5 ◽

1989 ◽

Vol 98 (4) ◽

pp. 777-781 ◽

Author(s):

Hiroshi Hirata ◽

Keigo Hoshikawa

Keyword(s):

Magnetic Field ◽

Oxygen Concentration ◽

Czochralski Silicon ◽

Silicon Crystals ◽

Cusp Magnetic Field

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Melt‐Motion during the Czochralski Growth of Silicon Crystals with a Cusp Magnetic Field

Journal of The Electrochemical Society ◽

10.1149/1.1837691 ◽

1997 ◽

Vol 144 (5) ◽

pp. 1861-1866 ◽

Author(s):

Y. Y. Khine ◽

J. S. Walker

Keyword(s):

Magnetic Field ◽

Czochralski Growth ◽

Silicon Crystals ◽

Cusp Magnetic Field

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Numerical simulation of oxygen transport during the Czochralski silicon crystal growth with a cusp magnetic field

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2013.10.040 ◽

2014 ◽

Vol 401 ◽

pp. 888-894 ◽

Author(s):

J.-C. Chen ◽

P.-C. Guo ◽

C.-H. Chang ◽

Y.-Y. Teng ◽

C. Hsu ◽

...

Keyword(s):

Magnetic Field ◽

Numerical Simulation ◽

Crystal Growth ◽

Oxygen Transport ◽

Silicon Crystal ◽

Czochralski Silicon ◽

Cusp Magnetic Field

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Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field

Chinese Journal of Chemical Engineering ◽

10.1016/s1004-9541(06)60031-1 ◽

2006 ◽

Vol 14 (1) ◽

pp. 8-14 ◽

Author(s):

Huiping YU ◽

Jing WANG ◽

Yunkang SUI ◽

Xiaolin DAI ◽

Guoping AN

Keyword(s):

Magnetic Field ◽

Heat Transfer ◽

Oxygen Transport ◽

Czochralski Silicon ◽

Silicon System ◽

Cusp Magnetic Field

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F203 Numerical Analysis of Czochralski Silicon Melt Flow Under a Strong Cusp Magnetic Field

Proceedings of thermal engineering conference ◽

10.1299/jsmeptec.2001.0_563 ◽

2001 ◽

Vol 2001 (0) ◽

pp. 563-564

Author(s):

Bo Yu ◽

Hiroyuki Ozoe ◽

Keigo Hoshikawi

Keyword(s):

Magnetic Field ◽

Numerical Analysis ◽

Melt Flow ◽

Czochralski Silicon ◽

Silicon Melt ◽

Cusp Magnetic Field

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Effect of cusp magnetic field on the turbulent melt flow and crystal/melt interface during large-size Czochralski silicon crystal growth

International Journal of Thermal Sciences ◽

10.1016/j.ijthermalsci.2021.107137 ◽

2021 ◽

Vol 170 ◽

pp. 107137

Author(s):

Junling Ding ◽

Yuqing Li ◽

Lijun Liu

Keyword(s):

Magnetic Field ◽

Crystal Growth ◽

Silicon Crystal ◽

Melt Flow ◽

Czochralski Silicon ◽

Cusp Magnetic Field

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Numerical simulation of effects of cusp magnetic field on oxygen concentration of 300 mm CZ-Si

Rare Metals ◽

10.1007/s12598-012-0546-z ◽

2012 ◽

Vol 31 (5) ◽

pp. 494-499 ◽

Author(s):

Yongtao Wang ◽

Wenting Xu ◽

Xiaolin Dai ◽

Qinghua Xiao ◽

Shujun Deng ◽

...

Keyword(s):

Magnetic Field ◽

Numerical Simulation ◽

Oxygen Concentration ◽

Cusp Magnetic Field

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Macroscopic Uniformity of Oxygen Concentration in Czochralski Silicon Crystals Closely Related to Evaporation of SiO from the Free Surface of Melts

Journal of The Electrochemical Society ◽

10.1149/1.1566023 ◽

2003 ◽

Vol 150 (5) ◽

pp. G319 ◽

Author(s):

Susumu Maeda ◽

Kazutaka Terashima

Keyword(s):

Free Surface ◽

Oxygen Concentration ◽

Czochralski Silicon ◽

Silicon Crystals

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Noncontact minority‐carrier lifetime measurement for magnetic field applied Czochralski silicon crystals

Journal of Applied Physics ◽

10.1063/1.348641 ◽

1991 ◽

Vol 69 (4) ◽

pp. 2700-2702 ◽

Author(s):

Y. Kirino ◽

F. Shimura

Keyword(s):

Magnetic Field ◽

Carrier Lifetime ◽

Minority Carrier ◽

Minority Carrier Lifetime ◽

Lifetime Measurement ◽

Czochralski Silicon ◽

Silicon Crystals

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Macroscopic Axial Dopant Distribution in Czochralski Silicon Crystals Grown in a Vertical Magnetic Field

Japanese Journal of Applied Physics ◽

10.1143/jjap.24.1399 ◽

1985 ◽

Vol 24 (Part 1, No. 11) ◽

pp. 1399-1403 ◽

Author(s):

Hiroshi Hirata ◽

Naohisa Inoue

Keyword(s):

Magnetic Field ◽

Vertical Magnetic Field ◽

Dopant Distribution ◽

Czochralski Silicon ◽

Silicon Crystals

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Effects of crystal-crucible iso-rotation and a balanced/unbalanced cusp magnetic field on the heat, flow, and oxygen transport in a Czochralski silicon melt

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2019.125373 ◽

2020 ◽

Vol 531 ◽

pp. 125373 ◽

Author(s):

Thi-Hoai-Thu Nguyen ◽

Jyh-Chen Chen ◽

Chieh Hu ◽

Chun-Hung Chen

Keyword(s):

Magnetic Field ◽

Heat Flow ◽

Oxygen Transport ◽

Czochralski Silicon ◽

Silicon Melt ◽

Cusp Magnetic Field

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