Effect of cusp magnetic field on the turbulent melt flow and crystal/melt interface during large-size Czochralski silicon crystal growth

International Journal of Thermal Sciences ◽

10.1016/j.ijthermalsci.2021.107137 ◽

2021 ◽

Vol 170 ◽

pp. 107137

Author(s):

Junling Ding ◽

Yuqing Li ◽

Lijun Liu

Keyword(s):

Magnetic Field ◽

Crystal Growth ◽

Silicon Crystal ◽

Melt Flow ◽

Czochralski Silicon ◽

Cusp Magnetic Field

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Numerical simulation of oxygen transport during the Czochralski silicon crystal growth with a cusp magnetic field

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2013.10.040 ◽

2014 ◽

Vol 401 ◽

pp. 888-894 ◽

Author(s):

J.-C. Chen ◽

P.-C. Guo ◽

C.-H. Chang ◽

Y.-Y. Teng ◽

C. Hsu ◽

...

Keyword(s):

Magnetic Field ◽

Numerical Simulation ◽

Crystal Growth ◽

Oxygen Transport ◽

Silicon Crystal ◽

Czochralski Silicon ◽

Cusp Magnetic Field

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A thermal model for czochralski silicon crystal growth with an axial magnetic field

Journal of Crystal Growth ◽

10.1016/0022-0248(90)90133-6 ◽

1990 ◽

Vol 104 (2) ◽

pp. 327-344 ◽

Author(s):

L.N. Hjellming

Keyword(s):

Magnetic Field ◽

Crystal Growth ◽

Thermal Model ◽

Axial Magnetic Field ◽

Silicon Crystal ◽

Czochralski Silicon

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F203 Numerical Analysis of Czochralski Silicon Melt Flow Under a Strong Cusp Magnetic Field

Proceedings of thermal engineering conference ◽

10.1299/jsmeptec.2001.0_563 ◽

2001 ◽

Vol 2001 (0) ◽

pp. 563-564

Author(s):

Bo Yu ◽

Hiroyuki Ozoe ◽

Keigo Hoshikawi

Keyword(s):

Magnetic Field ◽

Numerical Analysis ◽

Melt Flow ◽

Czochralski Silicon ◽

Silicon Melt ◽

Cusp Magnetic Field

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Oxygen partitioning analysis during Czochralski silicon crystal growth via a dopant marker and a simple transfer function modeling technique II. Growth velocity and applied magnetic field transients

Journal of Crystal Growth ◽

10.1016/0022-0248(92)90052-k ◽

1992 ◽

Vol 118 (1-2) ◽

pp. 85-92 ◽

Author(s):

C.T. Yen ◽

W.A. Tiller

Keyword(s):

Magnetic Field ◽

Crystal Growth ◽

Transfer Function ◽

Applied Magnetic Field ◽

Growth Velocity ◽

Silicon Crystal ◽

Modeling Technique ◽

Czochralski Silicon

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Silicon crystal growth in a cusp magnetic field

Journal of Crystal Growth ◽

10.1016/0022-0248(89)90631-3 ◽

1989 ◽

Vol 96 (4) ◽

pp. 747-755 ◽

Author(s):

Hiroshi Hirata ◽

Keigo Hoshikawa

Keyword(s):

Magnetic Field ◽

Crystal Growth ◽

Silicon Crystal ◽

Cusp Magnetic Field

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Czochralski Silicon Crystal Growth in the Vertical Magnetic Field

Japanese Journal of Applied Physics ◽

10.1143/jjap.21.l545 ◽

1982 ◽

Vol 21 (Part 2, No. 9) ◽

pp. L545-L547 ◽

Author(s):

Keigo Hoshikawa

Keyword(s):

Magnetic Field ◽

Crystal Growth ◽

Silicon Crystal ◽

Vertical Magnetic Field ◽

Czochralski Silicon

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Optimal Control of Temperature Gradient in a Large Size Magnetic Czochralski Silicon Crystal Growth by Response Surface Methodology

Computational Methods in Engineering & Science ◽

10.1007/978-3-540-48260-4_176 ◽

2006 ◽

pp. 330-330 ◽

Author(s):

H. P. Yu ◽

Y. K. Sui ◽

J. Wang ◽

X. L. Dai ◽

G. P. An

Keyword(s):

Optimal Control ◽

Response Surface Methodology ◽

Crystal Growth ◽

Temperature Gradient ◽

Response Surface ◽

Silicon Crystal ◽

Czochralski Silicon ◽

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The influence mechanism of melt flow instability on the temperature fluctuation on the crystal/melt interface during Czochralski silicon crystal growth

International Journal of Heat and Mass Transfer ◽

10.1016/j.ijheatmasstransfer.2019.118463 ◽

2019 ◽

Vol 142 ◽

pp. 118463 ◽

Author(s):

Junling Ding ◽

Lijun Liu

Keyword(s):

Crystal Growth ◽

Temperature Fluctuation ◽

Flow Instability ◽

Silicon Crystal ◽

Melt Flow ◽

Czochralski Silicon ◽

Influence Mechanism

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EFFECTS OF A CUSP MAGNETIC FIELD ON THERMAL WAVE INDUCED BY COUPLING OF NATURAL CONVECTION WITH ROTATING FLOW IN CZOCHRALSKI CRYSTAL GROWTH

Proceeding of International Heat Transfer Conference 11 ◽

10.1615/ihtc11.1000 ◽

1998 ◽

Author(s):

Y.-S. Lee ◽

C.-H. Chun

Keyword(s):

Magnetic Field ◽

Crystal Growth ◽

Natural Convection ◽

Thermal Wave ◽

Rotating Flow ◽

Czochralski Crystal Growth ◽

Wave Induced ◽

Cusp Magnetic Field

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Modelling of phase boundaries and melt flow in crucible-free silicon crystal growth using high-frequency heating

Magnetohydrodynamics ◽

10.22364/mhd.53.4.13 ◽

2017 ◽

Vol 53 (4) ◽

pp. 715-722

Author(s):

K. Suvorovs ◽

M. Plāte ◽

J. Virbulis

Keyword(s):

Crystal Growth ◽

High Frequency ◽

Silicon Crystal ◽

Melt Flow ◽

Phase Boundaries ◽

Free Silicon ◽

Frequency Heating

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