Chemical vapour deposition (CVD) of tungsten and tungsten carbide from tungsten hexachloide
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2013 ◽
Vol 686
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pp. 325-330
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2003 ◽
Vol 15
(39)
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pp. S2961-S2967
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1993 ◽
Vol 2
(12)
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pp. 1464-1466
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2004 ◽
Vol 37
(11-12)
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pp. 957-964
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