Auger electron spectroscopy and electron energy loss spectroscopy studies of the formation of silicon nitride by implanting low energy nitrogen ions into silicon

Thin Solid Films ◽

10.1016/0040-6090(81)90049-3 ◽

1981 ◽

Vol 85 (1) ◽

pp. 7-14 ◽

Author(s):

N. Lieske ◽

R. Hezel

Keyword(s):

Silicon Nitride ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Nitrogen Ions ◽

Spectroscopy Studies ◽

Electron Energy Loss

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Summary Abstract: Low‐energy electron diffraction, Auger electron spectroscopy, and electron energy‐loss spectroscopy studies of (511) and (711) GaAs surfaces

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574664 ◽

1987 ◽

Vol 5 (4) ◽

pp. 654-655 ◽

Author(s):

K. Young ◽

A. Kahn

Keyword(s):

Electron Diffraction ◽

Energy Loss ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Low Energy Electron Diffraction ◽

Low Energy Electron ◽

Spectroscopy Studies ◽

Electron Energy Loss

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Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and electron energy‐loss spectroscopy studies of MoSi2

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577917 ◽

1992 ◽

Vol 10 (4) ◽

pp. 2822-2825 ◽

Author(s):

R. S. Rastogi ◽

V. D. Vankar ◽

K. L. Chopra

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

X Ray ◽

Spectroscopy Studies ◽

Electron Energy Loss

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Characterization of plasma‐deposited silicon nitride films by Auger electron spectroscopy and electron energy loss spectroscopy

Journal of Applied Physics ◽

10.1063/1.331630 ◽

1982 ◽

Vol 53 (3) ◽

pp. 1671-1674 ◽

Author(s):

R. Hezel ◽

N. Lieske

Keyword(s):

Silicon Nitride ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Silicon Nitride Films ◽

Electron Energy Loss

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Auger electron spectroscopy and electron energy loss spectroscopy studies on carbonization of Si(100) and (111) surfaces with ethylene

Journal of Electron Spectroscopy and Related Phenomena ◽

10.1016/s0368-2048(03)00041-0 ◽

2003 ◽

Vol 130 (1-3) ◽

pp. 57-64 ◽

Author(s):

Chinthaka K. Wijesinghe ◽

M. Ikeda ◽

N. Nagashima

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Studies ◽

Electron Energy Loss

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Ordered Hg0.8Cd0.2Te (111)A and (111)B surfaces: Preparation by annealing in Hg vapor and characterization by low‐energy electron diffraction, Auger electron spectroscopy, and electron energy‐loss spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578124 ◽

1992 ◽

Vol 10 (1) ◽

pp. 122-130 ◽

Author(s):

John Y. Gui ◽

Donald A. Stern ◽

Arthur T. Hubbard

Keyword(s):

Electron Diffraction ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Low Energy Electron Diffraction ◽

Low Energy Electron ◽

Electron Energy Loss

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Auger electron spectroscopy, low energy electron diffraction and electron energy loss spectroscopy studies of Se overlayers grown on Cu(111) surfaces

Thin Solid Films ◽

10.1016/0040-6090(93)90565-7 ◽

1993 ◽

Vol 228 (1-2) ◽

pp. 64-67 ◽

Author(s):

Seiichi Nagashima ◽

Iwao Ogura

Keyword(s):

Electron Diffraction ◽

Energy Loss ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Low Energy Electron Diffraction ◽

Low Energy Electron ◽

Spectroscopy Studies ◽

Electron Energy Loss

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Auger-electron spectroscopy, electron-energy-loss spectroscopy, and x-ray photoemission spectroscopy studies of oxygen adsorption on the InP(111)-(1×1) surface

Physical Review B ◽

10.1103/physrevb.43.4803 ◽

1991 ◽

Vol 43 (6) ◽

pp. 4803-4808 ◽

Author(s):

Dao-xuan Dai ◽

Fu-rong Zhu

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxygen Adsorption ◽

Photoemission Spectroscopy ◽

X Ray ◽

Spectroscopy Studies ◽

Electron Energy Loss

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Oxidation study by Auger electron spectroscopy and electron energy-loss spectroscopy of GaSb(001) surfaces grown by molecular-beam epitaxy

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.584830 ◽

1990 ◽

Vol 8 (1) ◽

pp. 68 ◽

Author(s):

C. Raisin

Keyword(s):

Molecular Beam Epitaxy ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Molecular Beam ◽

Oxidation Study ◽

Electron Energy Loss

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A Technique for Performing Angle-Resolved Auger Electron Spectroscopy (ARAES) and Angle-Resolved Electron Energy Loss Spectroscopy (ARELS)

Springer Series in Surface Sciences - Auger Spectroscopy and Electronic Structure ◽

10.1007/978-3-642-75066-3_31 ◽

1989 ◽

pp. 251-256

Author(s):

G. B. Hoflund

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Electron Energy Loss

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An Auger electron spectroscopy/electron energy‐loss spectroscopy study on the oxidation of WSi2 thin film

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574620 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1456-1458 ◽

Author(s):

Jian‐Wei He ◽

Preben J. Mo/ller ◽

Jiann‐Ruey Chen

Keyword(s):

Thin Film ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Electron Energy Loss

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