Studies on chemical sputtering of silicon and carbon in Ar—H2 glow discharge plasma by optical emission spectroscopy
2007 ◽
Vol 202
(2)
◽
pp. 301-309
◽
2007 ◽
Vol 90
(2)
◽
pp. 9-16
◽
1989 ◽
Vol 38
(4)
◽
pp. 300-303
◽
2010 ◽
Vol 65
(7)
◽
pp. 533-541
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