Optical Emission Spectroscopy of Combined Laser Ablation-Hollow Cathode Glow Discharge Plasma Source

2017 ◽  
pp. 519-520
Author(s):  
Stefan Karatodorov ◽  
Valentin Mihailov ◽  
Margarita Grozeva
Keyword(s):  
Laser Ablation ◽  
Glow Discharge ◽  
Hollow Cathode ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Discharge Plasma ◽  
Optical Emission ◽  
Plasma Source ◽  
Glow Discharge Plasma

Optical Emission Spectroscopy Diagnostic of Discharge Plasma in a Hollow-Cathode Sputtering Source

2006 ◽  
Vol 45 (10B) ◽  
pp. 8128-8131 ◽  
Author(s):  
Radu Apetrei ◽  
Dumitru Alexandroaei ◽  
Dumitru Luca ◽  
Petru Balan ◽  
Codrina Ionita ◽  
...  
Keyword(s):  
Hollow Cathode ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Discharge Plasma ◽  
Optical Emission ◽  
Cathode Sputtering
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