Deposition of device quality silicon dioxide thin films by remote plasma enhanced chemical vapor deposition
Keyword(s):
1988 ◽
Vol 6
(3)
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pp. 1740-1744
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Keyword(s):
1998 ◽
Vol 16
(3)
◽
pp. 1087
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1989 ◽
Vol 7
(3)
◽
pp. 1136-1144
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Keyword(s):
1988 ◽
pp. 119-127
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Keyword(s):
2004 ◽
Vol 22
(3)
◽
pp. 570
◽
Keyword(s):
1988 ◽
Vol 6
(1)
◽
pp. 470
◽
Keyword(s):
1999 ◽
Vol 17
(2)
◽
pp. 460
◽
Keyword(s):
1993 ◽
Vol 140-142
◽
pp. 255-268
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