Deposition of copper oxide, titanium oxide and indium tin oxide films by reactive magnetron sputtering

Vacuum ◽  
1991 ◽  
Vol 42 (1-2) ◽  
pp. 53-55 ◽  
Author(s):  
DN Popov ◽  
PI Docheva
Keyword(s):  
Magnetron Sputtering ◽  
Copper Oxide ◽  
Titanium Oxide ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Tin Oxide Films

Reactive magnetron sputtering of indium tin oxide films on acrylics – morphology and bonding state

2000 ◽  
Vol 370 (1-2) ◽  
pp. 33-37 ◽  
Author(s):  
Jow-Lay Huang ◽  
Yin-Tsan Jah ◽  
Bao-Shun Yau ◽  
Ching-Yun Chen ◽  
Horng-Hwa Lu
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Bonding State ◽  
Tin Oxide Films
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