Ion bombardment-induced enhancement of the properties of indium tin oxide films prepared by plasma-assisted reactive magnetron sputtering

2009 ◽  
Vol 517 (16) ◽  
pp. 4576-4582 ◽  
Author(s):  
M. Dudek ◽  
A. Amassian ◽  
O. Zabeida ◽  
J.E. Klemberg-Sapieha ◽  
L. Martinu
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Ion Bombardment ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Tin Oxide Films

Reactive magnetron sputtering of indium tin oxide films on acrylics – morphology and bonding state

2000 ◽  
Vol 370 (1-2) ◽  
pp. 33-37 ◽  
Author(s):  
Jow-Lay Huang ◽  
Yin-Tsan Jah ◽  
Bao-Shun Yau ◽  
Ching-Yun Chen ◽  
Horng-Hwa Lu
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Bonding State ◽  
Tin Oxide Films
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