Comparison between chemical and pulsed laser etching of indium tin oxide thin films

Vacuum ◽  
1992 ◽  
Vol 43 (5-7) ◽  
pp. 737-739 ◽  
Author(s):  
A Banovec ◽  
M Kern
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Oxide Thin Films ◽  
Laser Etching

Laser etching of indium tin oxide thin films by ultra-short pulsed laser

2003 ◽  
Author(s):  
Ryuzo Tanaka ◽  
T. Takaoka ◽  
H. Mizukami ◽  
T. Arai ◽  
Y. Iwai
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Oxide Thin Films ◽  
Laser Etching

Pulsed laser etching of indium tin oxide thin films

Vacuum ◽  
1990 ◽  
Vol 40 (1-2) ◽  
pp. 238
Author(s):  
A Banovec ◽  
M Kern ◽  
K Požun ◽  
P Pavli ◽  
B Wagner
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Oxide Thin Films ◽  
Laser Etching

Pulsed Laser Deposition of Low-Resistivity Indium Tin Oxide Thin Films at Low Substrate Temperature

1999 ◽  
Vol 38 (Part 1, No. 5A) ◽  
pp. 2710-2716 ◽  
Author(s):  
Frederick Ojo Adurodija ◽  
Hirokazu Izumi ◽  
Tsuguo Ishihara ◽  
Hideki Yoshioka ◽  
Hiroshi Matsui ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Oxide Thin Films ◽  
Low Resistivity

Dielectric properties of pulsed-laser deposited indium tin oxide thin films

2012 ◽  
Vol 524 ◽  
pp. 249-256 ◽  
Author(s):  
G. Giusti ◽  
J. Bowen ◽  
Q. Ramasse ◽  
G. Rey ◽  
E. Blackburn ◽  
...  
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Oxide Thin Films

Pulsed laser deposition of conductive indium tin oxide thin films

2012 ◽  
Vol 48 (10) ◽  
pp. 1020-1025 ◽  
Author(s):  
I. A. Petukhov ◽  
A. N. Shatokhin ◽  
F. N. Putilin ◽  
M. N. Rumyantseva ◽  
V. F. Kozlovskii ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Oxide Thin Films
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