LITHOS: A fast electron beam lithography simulator
1994 ◽
Vol 23
(1-4)
◽
pp. 417-420
◽
1995 ◽
Vol 26
(3-4)
◽
pp. 131-140
◽
1993 ◽
Vol 32
(Part 1, No. 12B)
◽
pp. 6012-6017
◽
Keyword(s):
1996 ◽
Vol 15
(1)
◽
pp. 92-102
◽
2005 ◽
Vol 33
(5)
◽
pp. 1648-1653
◽
Keyword(s):
2011 ◽
Vol 53
(12)
◽
pp. 124012
◽
2010 ◽
Vol 12
(6)
◽
pp. 063018
◽