Production of low energy spread ion beams with multicusp sources

1996 ◽  
Vol 374 (1) ◽  
pp. 1-6 ◽  
Author(s):  
Y Lee ◽  
L.T Perkins ◽  
R.A Gough ◽  
M Hoffmann ◽  
W.B Kunkel ◽  
...  
Keyword(s):  
Ion Beams ◽  
Low Energy ◽  
Energy Spread

Chemical Precursors for GaAs Etching with low Energy ion Beams: Chlorine adsorption on GaAs(100)

1991 ◽  
Vol 223 ◽  
Author(s):  
Richard B. Jackman ◽  
Glenn C. Tyrrell ◽  
Duncan Marshall ◽  
Catherine L. French ◽  
John S. Foord
Keyword(s):  
Ion Beam ◽  
Ion Beams ◽  
Low Energy ◽  
Ion Beam Etching ◽  
Chlorine Adsorption

ABSTRACTThis paper addresses the issue of chlorine adsorption on GaAs(100) with respect to the mechanisms of thermal and ion-enhanced etching. The use of halogenated precursors eg. dichloroethane is also discussed in regard to chemically assisted ion beam etching (CAIBE).

An automatic beam positioning system for low energy ion beams

1969 ◽  
Vol 72 (2) ◽  
pp. 217-219 ◽  
Author(s):  
R.B. Brown ◽  
P.D. Bourland ◽  
D. Powers
Keyword(s):  
Ion Beams ◽  
Low Energy ◽  
Positioning System

Transport of intense ion beams and space charge compensation issues in low energy beam lines (invited)

2012 ◽  
Vol 83 (2) ◽  
pp. 02B320 ◽  
Author(s):  
N. Chauvin ◽  
O. Delferrière ◽  
R. Duperrier ◽  
R. Gobin ◽  
P. A. P. Nghiem ◽  
...  
Keyword(s):  
Space Charge ◽  
Charge Compensation ◽  
Ion Beams ◽  
Low Energy ◽  
Energy Beam

Patterning of Ionic Insulator Surfaces with Low-Energy Ion Beams

2012 ◽  
pp. 109-134 ◽  
Author(s):  
Franciszek Krok ◽  
Salah Saeed ◽  
Marek Kolmer ◽  
Marek Szymonski
Keyword(s):  
Ion Beams ◽  
Low Energy
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