Study of the chemical composition of silicon nitride films obtained by chemical vapour deposition and plasma-enhanced chemical vapour deposition
Keyword(s):
1993 ◽
Vol 2
(6)
◽
pp. 301-312
◽
Keyword(s):
1990 ◽
pp. 327-330
Keyword(s):
1999 ◽
Vol 27
(7)
◽
pp. 638-643
◽
1994 ◽
Vol 5
(5)
◽
pp. 255-259
◽
1986 ◽
Vol 25
(Part 1, No. 10)
◽
pp. 1490-1494
◽
Keyword(s):
Keyword(s):