In-situ film thickness measurement for CVD by use of spectrometer
1994 ◽
Vol 68-69
◽
pp. 394-397
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Keyword(s):
1992 ◽
Vol 10
(4)
◽
pp. 934-938
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Keyword(s):
1993 ◽
Vol 64
(8)
◽
pp. 2405-2406
◽
2010 ◽
Vol 283
(20)
◽
pp. 3989-3993
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