High resolution electron energy loss spectroscopic characterization of insulators for Si technology

1990 ◽  
Vol 54-55 ◽  
pp. 1013-1032 ◽  
Author(s):  
M. Liehr ◽  
P.A. Thiry
1998 ◽  
Vol 327-329 ◽  
pp. 252-255 ◽  
Author(s):  
O. Pellegrino ◽  
M. Rei Vilar ◽  
G. Horowitz ◽  
F. Kouki ◽  
F. Garnier ◽  
...  

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