Silicon homoepitaxy using photochemical vapor deposition: a reflection high energy electron diffraction and transmission electron microscopy study

1991 ◽  
Vol 10 (3) ◽  
pp. 181-186 ◽  
Author(s):  
S. Lian ◽  
B. Fowler ◽  
S. Krishnan ◽  
L. Jung ◽  
S. Banerjee
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Vapor Deposition ◽  
Microscopy Study ◽  
High Energy ◽  
Electron Microscopy Study ◽  
High Energy Electron ◽  
Transmission Electron Microscopy Study ◽  
Transmission Electron ◽  
Photochemical Vapor Deposition
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